JPH0464572B2 - - Google Patents

Info

Publication number
JPH0464572B2
JPH0464572B2 JP60284187A JP28418785A JPH0464572B2 JP H0464572 B2 JPH0464572 B2 JP H0464572B2 JP 60284187 A JP60284187 A JP 60284187A JP 28418785 A JP28418785 A JP 28418785A JP H0464572 B2 JPH0464572 B2 JP H0464572B2
Authority
JP
Japan
Prior art keywords
package
sensing fluid
fluid
cavity
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60284187A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62147337A (ja
Inventor
Itesu Edowaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ANZEN BOEKI KK
UEBU TEKUNOROJII Inc
Original Assignee
ANZEN BOEKI KK
UEBU TEKUNOROJII Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ANZEN BOEKI KK, UEBU TEKUNOROJII Inc filed Critical ANZEN BOEKI KK
Priority to JP28418785A priority Critical patent/JPS62147337A/ja
Publication of JPS62147337A publication Critical patent/JPS62147337A/ja
Publication of JPH0464572B2 publication Critical patent/JPH0464572B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP28418785A 1985-12-17 1985-12-17 電子部品パッケージの密閉度試験方法 Granted JPS62147337A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28418785A JPS62147337A (ja) 1985-12-17 1985-12-17 電子部品パッケージの密閉度試験方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28418785A JPS62147337A (ja) 1985-12-17 1985-12-17 電子部品パッケージの密閉度試験方法

Publications (2)

Publication Number Publication Date
JPS62147337A JPS62147337A (ja) 1987-07-01
JPH0464572B2 true JPH0464572B2 (enrdf_load_stackoverflow) 1992-10-15

Family

ID=17675298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28418785A Granted JPS62147337A (ja) 1985-12-17 1985-12-17 電子部品パッケージの密閉度試験方法

Country Status (1)

Country Link
JP (1) JPS62147337A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007218745A (ja) * 2006-02-16 2007-08-30 Denso Corp 気密漏れ検査方法及び装置
JP4895184B2 (ja) * 2006-07-31 2012-03-14 京セラキンセキ株式会社 電子部品パッケージの気密検査方法と気密検査装置
JP5194243B2 (ja) * 2007-09-28 2013-05-08 アキム株式会社 センサ用リーク検査装置およびセンサのリーク検査方法
US11885716B2 (en) * 2017-10-10 2024-01-30 Mitsubishi Electric Corporation Test method of a semiconductor device and manufacturing method of a semiconductor device
JP6381848B1 (ja) * 2018-06-06 2018-08-29 三菱電機株式会社 半導体装置の試験方法、および半導体装置の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5091378A (enrdf_load_stackoverflow) * 1973-12-12 1975-07-22
JPS56157659U (enrdf_load_stackoverflow) * 1980-04-22 1981-11-25
JPS58140621A (ja) * 1982-02-16 1983-08-20 Rigaku Denki Kogyo Kk 放射線検出用シンチレ−タ検査装置
JPS6010131A (ja) * 1983-06-30 1985-01-19 Fujitsu Ltd 漏洩ガスの検知方法
JPS60176156U (ja) * 1984-04-30 1985-11-21 株式会社島津製作所 リ−クテスト装置

Also Published As

Publication number Publication date
JPS62147337A (ja) 1987-07-01

Similar Documents

Publication Publication Date Title
US4920785A (en) Hermeticity testing method and system
CN107677335B (zh) 测量物体体积和孔隙率的装置和方法及真空气体密封方法
US8544315B2 (en) At rest vacuum state for vacuum decay leak testing method and system
US4918975A (en) Method and apparatus for testing fluid-filled systems for leaks
JP6457813B2 (ja) 検査ガスの添加無しの、寸法的に安定な／緩んだパッケージの漏れの迅速な検出
US5131263A (en) Device and a method for detecting leaks
KR0171635B1 (ko) 가스 누출 검사 장치 및 방법
WO2006093935A2 (en) Apparatus and process for leak-testing and qualification of fluid dispensing vessels
US3578758A (en) Orifice gross leak tester
KR102574722B1 (ko) 동적 진공 감쇠 누출 탐지 방법 및 장치
CN101151514A (zh) 用于流体分配容器的泄漏测试和鉴定的设备及方法
EP3431949B1 (en) Leakage inspection method and leakage inspection device for container to be inspected
CA2100739C (en) Leakage measurement into a gas-charged container
CN109932141A (zh) 一种用于航天低温复合材料贮箱的渗漏性测试装置
JPH0464572B2 (enrdf_load_stackoverflow)
US3805595A (en) Apparatus for testing leakage
CN209570302U (zh) 一种用于航天低温复合材料构件的渗漏性测试装置
Davy Model calculations for maximum allowable leak rates of hermetic packages
CN109932140A (zh) 一种用于航天低温复合材料构件的渗漏性测试装置
CN209570303U (zh) 一种用于航天低温复合材料贮箱的渗漏性测试装置
JP4288006B2 (ja) 比較的薄い壁を有する試験体で積分法によるリークテストを実施する方法
JPH09144998A (ja) ハロゲン化物ガス漏洩検査装置
JPH01131428A (ja) 半導体装置の気密度の測定方法
Niemeyer LEAK TESTING ENCAPSULATED RADIOACTIVE SOURCES.
JPH0253736B2 (enrdf_load_stackoverflow)