JPH046279B2 - - Google Patents
Info
- Publication number
- JPH046279B2 JPH046279B2 JP60038391A JP3839185A JPH046279B2 JP H046279 B2 JPH046279 B2 JP H046279B2 JP 60038391 A JP60038391 A JP 60038391A JP 3839185 A JP3839185 A JP 3839185A JP H046279 B2 JPH046279 B2 JP H046279B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- thin film
- zno
- light
- transparent electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 37
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 239000013078 crystal Substances 0.000 claims description 17
- 239000010408 film Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60038391A JPS61198592A (ja) | 1985-02-27 | 1985-02-27 | 薄膜ｅｌ素子 |
| US06/828,020 US4737684A (en) | 1985-02-21 | 1986-02-10 | Thin film EL element having a crystal-orientable ZnO sublayer for a light-emitting layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60038391A JPS61198592A (ja) | 1985-02-27 | 1985-02-27 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61198592A JPS61198592A (ja) | 1986-09-02 |
| JPH046279B2 true JPH046279B2 (pl) | 1992-02-05 |
Family
ID=12523981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60038391A Granted JPS61198592A (ja) | 1985-02-21 | 1985-02-27 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61198592A (pl) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2758660B2 (ja) * | 1989-07-18 | 1998-05-28 | グンゼ株式会社 | 酸化亜鉛を透明電極とした分散型エレクトロルミネッセンス素子 |
| JPH04108457U (ja) * | 1991-03-01 | 1992-09-18 | 株式会社東海理化電機製作所 | エアバツグ装置の袋体 |
| JP2008197296A (ja) * | 2007-02-13 | 2008-08-28 | Sony Corp | エレクトロウェッティングデバイス及びその製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56110779A (en) * | 1980-02-06 | 1981-09-02 | Matsushita Electric Ind Co Ltd | Display device |
| JPS5859594A (ja) * | 1981-10-03 | 1983-04-08 | コニカ株式会社 | 発光素子 |
| JPS59101794A (ja) * | 1982-12-02 | 1984-06-12 | 株式会社デンソー | 薄膜エレクトロルミネツセンス素子 |
| JPS59175593A (ja) * | 1983-03-25 | 1984-10-04 | 松下電器産業株式会社 | エレクトロルミネセンス表示装置 |
-
1985
- 1985-02-27 JP JP60038391A patent/JPS61198592A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56110779A (en) * | 1980-02-06 | 1981-09-02 | Matsushita Electric Ind Co Ltd | Display device |
| JPS5859594A (ja) * | 1981-10-03 | 1983-04-08 | コニカ株式会社 | 発光素子 |
| JPS59101794A (ja) * | 1982-12-02 | 1984-06-12 | 株式会社デンソー | 薄膜エレクトロルミネツセンス素子 |
| JPS59175593A (ja) * | 1983-03-25 | 1984-10-04 | 松下電器産業株式会社 | エレクトロルミネセンス表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61198592A (ja) | 1986-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |