JPH046064B2 - - Google Patents

Info

Publication number
JPH046064B2
JPH046064B2 JP61265391A JP26539186A JPH046064B2 JP H046064 B2 JPH046064 B2 JP H046064B2 JP 61265391 A JP61265391 A JP 61265391A JP 26539186 A JP26539186 A JP 26539186A JP H046064 B2 JPH046064 B2 JP H046064B2
Authority
JP
Japan
Prior art keywords
electrode
charged particle
analyzer
cylindrical mirror
particle energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61265391A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62157653A (ja
Inventor
Roketsuto Peetaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BUI JII INSUTORUMENTSU GURUUPU Ltd
Original Assignee
BUI JII INSUTORUMENTSU GURUUPU Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BUI JII INSUTORUMENTSU GURUUPU Ltd filed Critical BUI JII INSUTORUMENTSU GURUUPU Ltd
Publication of JPS62157653A publication Critical patent/JPS62157653A/ja
Publication of JPH046064B2 publication Critical patent/JPH046064B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers
    • H01J49/48Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
JP61265391A 1985-11-07 1986-11-07 荷電粒子エネルギ分析器 Granted JPS62157653A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB858527438A GB8527438D0 (en) 1985-11-07 1985-11-07 Charged particle energy analyser
GB8527438 1985-11-07

Publications (2)

Publication Number Publication Date
JPS62157653A JPS62157653A (ja) 1987-07-13
JPH046064B2 true JPH046064B2 (https=) 1992-02-04

Family

ID=10587856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61265391A Granted JPS62157653A (ja) 1985-11-07 1986-11-07 荷電粒子エネルギ分析器

Country Status (5)

Country Link
US (1) US4769542A (https=)
EP (1) EP0223520B1 (https=)
JP (1) JPS62157653A (https=)
DE (1) DE3672025D1 (https=)
GB (1) GB8527438D0 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0545064B1 (de) * 1991-12-02 2001-08-08 Unaxis Balzers Aktiengesellschaft Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter
GB9219457D0 (en) * 1992-09-15 1992-10-28 Fisons Plc Reducing interferences in plasma source mass spectrometers
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
US6184523B1 (en) 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JP4588602B2 (ja) * 2005-09-30 2010-12-01 株式会社トプコン 静電偏向器の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy

Also Published As

Publication number Publication date
EP0223520B1 (en) 1990-06-13
JPS62157653A (ja) 1987-07-13
US4769542A (en) 1988-09-06
DE3672025D1 (de) 1990-07-19
GB8527438D0 (en) 1985-12-11
EP0223520A1 (en) 1987-05-27

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