DE3672025D1 - Energieanalysator fuer geladene teilchen. - Google Patents

Energieanalysator fuer geladene teilchen.

Info

Publication number
DE3672025D1
DE3672025D1 DE8686308683T DE3672025T DE3672025D1 DE 3672025 D1 DE3672025 D1 DE 3672025D1 DE 8686308683 T DE8686308683 T DE 8686308683T DE 3672025 T DE3672025 T DE 3672025T DE 3672025 D1 DE3672025 D1 DE 3672025D1
Authority
DE
Germany
Prior art keywords
charged particles
energy analyzer
analyzer
energy
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686308683T
Other languages
German (de)
English (en)
Inventor
Peter Rockett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fisons Ltd
Original Assignee
VG INSTRUMENTS GROUP Ltd CRAWLEY WEST SUSSEX GB
VG Instruments Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VG INSTRUMENTS GROUP Ltd CRAWLEY WEST SUSSEX GB, VG Instruments Group Ltd filed Critical VG INSTRUMENTS GROUP Ltd CRAWLEY WEST SUSSEX GB
Application granted granted Critical
Publication of DE3672025D1 publication Critical patent/DE3672025D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
DE8686308683T 1985-11-07 1986-11-07 Energieanalysator fuer geladene teilchen. Expired - Lifetime DE3672025D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858527438A GB8527438D0 (en) 1985-11-07 1985-11-07 Charged particle energy analyser

Publications (1)

Publication Number Publication Date
DE3672025D1 true DE3672025D1 (de) 1990-07-19

Family

ID=10587856

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686308683T Expired - Lifetime DE3672025D1 (de) 1985-11-07 1986-11-07 Energieanalysator fuer geladene teilchen.

Country Status (5)

Country Link
US (1) US4769542A (https=)
EP (1) EP0223520B1 (https=)
JP (1) JPS62157653A (https=)
DE (1) DE3672025D1 (https=)
GB (1) GB8527438D0 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0545064B1 (de) * 1991-12-02 2001-08-08 Unaxis Balzers Aktiengesellschaft Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter
GB9219457D0 (en) * 1992-09-15 1992-10-28 Fisons Plc Reducing interferences in plasma source mass spectrometers
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
US6184523B1 (en) 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JP4588602B2 (ja) * 2005-09-30 2010-12-01 株式会社トプコン 静電偏向器の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy

Also Published As

Publication number Publication date
EP0223520B1 (en) 1990-06-13
JPS62157653A (ja) 1987-07-13
US4769542A (en) 1988-09-06
GB8527438D0 (en) 1985-12-11
EP0223520A1 (en) 1987-05-27
JPH046064B2 (https=) 1992-02-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FISONS PLC, IPSWICH, SUFFOLK, GB

8328 Change in the person/name/address of the agent

Free format text: WEICKMANN, H., DIPL.-ING. FINCKE, K., DIPL.-PHYS. DR. WEICKMANN, F., DIPL.-ING. HUBER, B., DIPL.-CHEM. LISKA, H., DIPL.-ING. DR.-ING. PRECHTEL, J., DIPL.-PHYS. DR.RER.NAT. BOEHM, B., DIPL.-CHEM.UNIV. DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN

8339 Ceased/non-payment of the annual fee