DE3672025D1 - Energieanalysator fuer geladene teilchen. - Google Patents
Energieanalysator fuer geladene teilchen.Info
- Publication number
- DE3672025D1 DE3672025D1 DE8686308683T DE3672025T DE3672025D1 DE 3672025 D1 DE3672025 D1 DE 3672025D1 DE 8686308683 T DE8686308683 T DE 8686308683T DE 3672025 T DE3672025 T DE 3672025T DE 3672025 D1 DE3672025 D1 DE 3672025D1
- Authority
- DE
- Germany
- Prior art keywords
- charged particles
- energy analyzer
- analyzer
- energy
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB858527438A GB8527438D0 (en) | 1985-11-07 | 1985-11-07 | Charged particle energy analyser |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3672025D1 true DE3672025D1 (de) | 1990-07-19 |
Family
ID=10587856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686308683T Expired - Lifetime DE3672025D1 (de) | 1985-11-07 | 1986-11-07 | Energieanalysator fuer geladene teilchen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4769542A (de) |
EP (1) | EP0223520B1 (de) |
JP (1) | JPS62157653A (de) |
DE (1) | DE3672025D1 (de) |
GB (1) | GB8527438D0 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59209914D1 (de) * | 1991-12-02 | 2001-09-13 | Unaxis Balzers Ag | Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter |
GB9219457D0 (en) * | 1992-09-15 | 1992-10-28 | Fisons Plc | Reducing interferences in plasma source mass spectrometers |
US5444243A (en) * | 1993-09-01 | 1995-08-22 | Hitachi, Ltd. | Wien filter apparatus with hyperbolic surfaces |
US6184523B1 (en) | 1998-07-14 | 2001-02-06 | Board Of Regents Of The University Of Nebraska | High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use |
JP4588602B2 (ja) * | 2005-09-30 | 2010-12-01 | 株式会社トプコン | 静電偏向器の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2347946A1 (de) * | 1973-09-24 | 1975-04-10 | Max Planck Gesellschaft | Quadrupolfeld-massenanalysator hoher eingangsapertur |
US4126782A (en) * | 1976-02-09 | 1978-11-21 | Hitachi, Ltd. | Electrostatic charged-particle analyzer |
US4205226A (en) * | 1978-09-01 | 1980-05-27 | The Perkin-Elmer Corporation | Auger electron spectroscopy |
-
1985
- 1985-11-07 GB GB858527438A patent/GB8527438D0/en active Pending
-
1986
- 1986-11-07 US US06/928,038 patent/US4769542A/en not_active Expired - Fee Related
- 1986-11-07 DE DE8686308683T patent/DE3672025D1/de not_active Expired - Lifetime
- 1986-11-07 EP EP86308683A patent/EP0223520B1/de not_active Expired
- 1986-11-07 JP JP61265391A patent/JPS62157653A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4769542A (en) | 1988-09-06 |
EP0223520B1 (de) | 1990-06-13 |
EP0223520A1 (de) | 1987-05-27 |
JPS62157653A (ja) | 1987-07-13 |
GB8527438D0 (en) | 1985-12-11 |
JPH046064B2 (de) | 1992-02-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FISONS PLC, IPSWICH, SUFFOLK, GB |
|
8328 | Change in the person/name/address of the agent |
Free format text: WEICKMANN, H., DIPL.-ING. FINCKE, K., DIPL.-PHYS. DR. WEICKMANN, F., DIPL.-ING. HUBER, B., DIPL.-CHEM. LISKA, H., DIPL.-ING. DR.-ING. PRECHTEL, J., DIPL.-PHYS. DR.RER.NAT. BOEHM, B., DIPL.-CHEM.UNIV. DR.RER.NAT., PAT.-ANWAELTE, 8000 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |