DE69028647T2 - Energieanalysator für geladene Teilchen - Google Patents

Energieanalysator für geladene Teilchen

Info

Publication number
DE69028647T2
DE69028647T2 DE69028647T DE69028647T DE69028647T2 DE 69028647 T2 DE69028647 T2 DE 69028647T2 DE 69028647 T DE69028647 T DE 69028647T DE 69028647 T DE69028647 T DE 69028647T DE 69028647 T2 DE69028647 T2 DE 69028647T2
Authority
DE
Germany
Prior art keywords
charged particles
energy analyzer
analyzer
energy
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028647T
Other languages
English (en)
Other versions
DE69028647D1 (de
Inventor
Shozo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Publication of DE69028647D1 publication Critical patent/DE69028647D1/de
Application granted granted Critical
Publication of DE69028647T2 publication Critical patent/DE69028647T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
DE69028647T 1989-03-24 1990-03-22 Energieanalysator für geladene Teilchen Expired - Fee Related DE69028647T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7047289 1989-03-24

Publications (2)

Publication Number Publication Date
DE69028647D1 DE69028647D1 (de) 1996-10-31
DE69028647T2 true DE69028647T2 (de) 1997-02-13

Family

ID=13432502

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028647T Expired - Fee Related DE69028647T2 (de) 1989-03-24 1990-03-22 Energieanalysator für geladene Teilchen

Country Status (4)

Country Link
US (1) US5032723A (de)
EP (1) EP0388959B1 (de)
CA (1) CA2012879A1 (de)
DE (1) DE69028647T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0510897A (ja) * 1991-07-02 1993-01-19 Jeol Ltd Ｘ線光電子分光イメージング装置
US5541409A (en) * 1994-07-08 1996-07-30 The United States Of America As Represented By The Secretary Of The Air Force High resolution retarding potential analyzer
US6184523B1 (en) 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
US6867414B2 (en) * 2002-09-24 2005-03-15 Ciphergen Biosystems, Inc. Electric sector time-of-flight mass spectrometer with adjustable ion optical elements
US6797951B1 (en) 2002-11-12 2004-09-28 The United States Of America As Represented By The Secretary Of The Air Force Laminated electrostatic analyzer
US20060043291A1 (en) * 2004-08-26 2006-03-02 Peng Gang G Electron spectroscopic metrology system
US7560691B1 (en) * 2007-01-19 2009-07-14 Kla-Tencor Technologies Corporation High-resolution auger electron spectrometer
US8013298B2 (en) * 2008-07-14 2011-09-06 National University Of Singapore Electrostatic electron spectrometry apparatus
EP2454749A4 (de) * 2009-07-17 2013-09-04 Kla Tencor Corp Stromanalysegerät für geladene partikel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1327572A (en) * 1971-03-23 1973-08-22 Ass Elect Ind Apparatus for use in charged particle spectroscopy
EP0058154A1 (de) * 1980-05-12 1982-08-25 La Trobe University Nach winkel resolvierendes spektrometer
SU1430999A1 (ru) * 1986-02-21 1988-10-15 Ленинградский Политехнический Институт Им.М.И.Калинина Электростатический энергоанализатор типа "цилиндрическое зеркало
FR2634286B1 (fr) * 1988-07-18 1993-10-01 Inst Yadernoi Fiziki Akademii Analyseur de l'energie de faisceaux de particules chargees spherique a reflexion

Also Published As

Publication number Publication date
EP0388959A2 (de) 1990-09-26
DE69028647D1 (de) 1996-10-31
EP0388959B1 (de) 1996-09-25
US5032723A (en) 1991-07-16
EP0388959A3 (de) 1991-08-07
CA2012879A1 (en) 1990-09-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee