GB8527438D0 - Charged particle energy analyser - Google Patents

Charged particle energy analyser

Info

Publication number
GB8527438D0
GB8527438D0 GB858527438A GB8527438A GB8527438D0 GB 8527438 D0 GB8527438 D0 GB 8527438D0 GB 858527438 A GB858527438 A GB 858527438A GB 8527438 A GB8527438 A GB 8527438A GB 8527438 D0 GB8527438 D0 GB 8527438D0
Authority
GB
United Kingdom
Prior art keywords
charged particle
particle energy
energy analyser
analyser
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB858527438A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VG Instruments Group Ltd
Original Assignee
VG Instruments Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VG Instruments Group Ltd filed Critical VG Instruments Group Ltd
Priority to GB858527438A priority Critical patent/GB8527438D0/en
Publication of GB8527438D0 publication Critical patent/GB8527438D0/en
Priority to US06/928,038 priority patent/US4769542A/en
Priority to EP86308683A priority patent/EP0223520B1/en
Priority to JP61265391A priority patent/JPS62157653A/ja
Priority to DE8686308683T priority patent/DE3672025D1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
GB858527438A 1985-11-07 1985-11-07 Charged particle energy analyser Pending GB8527438D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB858527438A GB8527438D0 (en) 1985-11-07 1985-11-07 Charged particle energy analyser
US06/928,038 US4769542A (en) 1985-11-07 1986-11-07 Charged particle energy analyzer
EP86308683A EP0223520B1 (en) 1985-11-07 1986-11-07 Charged particle energy analyser
JP61265391A JPS62157653A (ja) 1985-11-07 1986-11-07 荷電粒子エネルギ分析器
DE8686308683T DE3672025D1 (de) 1985-11-07 1986-11-07 Energieanalysator fuer geladene teilchen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858527438A GB8527438D0 (en) 1985-11-07 1985-11-07 Charged particle energy analyser

Publications (1)

Publication Number Publication Date
GB8527438D0 true GB8527438D0 (en) 1985-12-11

Family

ID=10587856

Family Applications (1)

Application Number Title Priority Date Filing Date
GB858527438A Pending GB8527438D0 (en) 1985-11-07 1985-11-07 Charged particle energy analyser

Country Status (5)

Country Link
US (1) US4769542A (https=)
EP (1) EP0223520B1 (https=)
JP (1) JPS62157653A (https=)
DE (1) DE3672025D1 (https=)
GB (1) GB8527438D0 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0545064B1 (de) * 1991-12-02 2001-08-08 Unaxis Balzers Aktiengesellschaft Verfahren zur Filterung elektrisch geladener Teilchen, Energiefilter und Analysator mit einem solchen Energiefilter
GB9219457D0 (en) * 1992-09-15 1992-10-28 Fisons Plc Reducing interferences in plasma source mass spectrometers
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
US6184523B1 (en) 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
JP4588602B2 (ja) * 2005-09-30 2010-12-01 株式会社トプコン 静電偏向器の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2347946A1 (de) * 1973-09-24 1975-04-10 Max Planck Gesellschaft Quadrupolfeld-massenanalysator hoher eingangsapertur
US4126782A (en) * 1976-02-09 1978-11-21 Hitachi, Ltd. Electrostatic charged-particle analyzer
US4205226A (en) * 1978-09-01 1980-05-27 The Perkin-Elmer Corporation Auger electron spectroscopy

Also Published As

Publication number Publication date
EP0223520B1 (en) 1990-06-13
JPS62157653A (ja) 1987-07-13
US4769542A (en) 1988-09-06
DE3672025D1 (de) 1990-07-19
EP0223520A1 (en) 1987-05-27
JPH046064B2 (https=) 1992-02-04

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