JPH0459563B2 - - Google Patents

Info

Publication number
JPH0459563B2
JPH0459563B2 JP61219189A JP21918986A JPH0459563B2 JP H0459563 B2 JPH0459563 B2 JP H0459563B2 JP 61219189 A JP61219189 A JP 61219189A JP 21918986 A JP21918986 A JP 21918986A JP H0459563 B2 JPH0459563 B2 JP H0459563B2
Authority
JP
Japan
Prior art keywords
image data
signal
converting
shape
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61219189A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6375507A (ja
Inventor
Tetsushi Imi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP21918986A priority Critical patent/JPS6375507A/ja
Publication of JPS6375507A publication Critical patent/JPS6375507A/ja
Publication of JPH0459563B2 publication Critical patent/JPH0459563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
JP21918986A 1986-09-19 1986-09-19 くぼみ穴測定方法及び装置 Granted JPS6375507A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21918986A JPS6375507A (ja) 1986-09-19 1986-09-19 くぼみ穴測定方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21918986A JPS6375507A (ja) 1986-09-19 1986-09-19 くぼみ穴測定方法及び装置

Publications (2)

Publication Number Publication Date
JPS6375507A JPS6375507A (ja) 1988-04-05
JPH0459563B2 true JPH0459563B2 (enrdf_load_stackoverflow) 1992-09-22

Family

ID=16731601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21918986A Granted JPS6375507A (ja) 1986-09-19 1986-09-19 くぼみ穴測定方法及び装置

Country Status (1)

Country Link
JP (1) JPS6375507A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4040497A1 (en) 2021-01-22 2022-08-10 Fuji Electric Co., Ltd. Semiconductor device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006162250A (ja) * 2004-12-02 2006-06-22 Ushio Inc フィルムワークのパターン検査装置
JP4694923B2 (ja) * 2005-09-07 2011-06-08 大日本印刷株式会社 撮像方法及び撮像装置
AU2017296488B2 (en) * 2016-07-12 2021-10-28 Yoshino Gypsum Co., Ltd. Inspection method, inspection/notification method, manufacturing method including inspection method, inspection apparatus, and manufacturing apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143686A (en) * 1981-03-02 1982-09-04 Fuji Electric Co Ltd Recognizing device for plural patterns
JPS5965709A (ja) * 1982-10-07 1984-04-14 Kawasaki Steel Corp ストリツプエツジ部の厚さプロフイ−ル測定方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4040497A1 (en) 2021-01-22 2022-08-10 Fuji Electric Co., Ltd. Semiconductor device

Also Published As

Publication number Publication date
JPS6375507A (ja) 1988-04-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees