JPS6375507A - くぼみ穴測定方法及び装置 - Google Patents
くぼみ穴測定方法及び装置Info
- Publication number
- JPS6375507A JPS6375507A JP21918986A JP21918986A JPS6375507A JP S6375507 A JPS6375507 A JP S6375507A JP 21918986 A JP21918986 A JP 21918986A JP 21918986 A JP21918986 A JP 21918986A JP S6375507 A JPS6375507 A JP S6375507A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- image
- recessed hole
- iron plate
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003384 imaging method Methods 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 9
- 230000002950 deficient Effects 0.000 claims description 4
- 238000012360 testing method Methods 0.000 claims description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 58
- 229910052742 iron Inorganic materials 0.000 abstract description 29
- 238000000034 method Methods 0.000 abstract description 21
- 238000009499 grossing Methods 0.000 abstract description 5
- 238000005429 filling process Methods 0.000 abstract description 2
- 238000007788 roughening Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 17
- 230000003287 optical effect Effects 0.000 description 13
- 238000001514 detection method Methods 0.000 description 9
- 229910000831 Steel Inorganic materials 0.000 description 8
- 239000010959 steel Substances 0.000 description 8
- 238000005286 illumination Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004886 process control Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000002372 labelling Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 206010026749 Mania Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21918986A JPS6375507A (ja) | 1986-09-19 | 1986-09-19 | くぼみ穴測定方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21918986A JPS6375507A (ja) | 1986-09-19 | 1986-09-19 | くぼみ穴測定方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6375507A true JPS6375507A (ja) | 1988-04-05 |
| JPH0459563B2 JPH0459563B2 (enrdf_load_stackoverflow) | 1992-09-22 |
Family
ID=16731601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21918986A Granted JPS6375507A (ja) | 1986-09-19 | 1986-09-19 | くぼみ穴測定方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375507A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162250A (ja) * | 2004-12-02 | 2006-06-22 | Ushio Inc | フィルムワークのパターン検査装置 |
| JP2007071731A (ja) * | 2005-09-07 | 2007-03-22 | Dainippon Printing Co Ltd | 撮像方法及び撮像装置 |
| WO2018012192A1 (ja) * | 2016-07-12 | 2018-01-18 | 吉野石膏株式会社 | 検査方法、検査・通知方法、該検査方法を含む製造方法、検査装置及び製造装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7622449B2 (ja) | 2021-01-22 | 2025-01-28 | 富士電機株式会社 | 半導体装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57143686A (en) * | 1981-03-02 | 1982-09-04 | Fuji Electric Co Ltd | Recognizing device for plural patterns |
| JPS5965709A (ja) * | 1982-10-07 | 1984-04-14 | Kawasaki Steel Corp | ストリツプエツジ部の厚さプロフイ−ル測定方法 |
-
1986
- 1986-09-19 JP JP21918986A patent/JPS6375507A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57143686A (en) * | 1981-03-02 | 1982-09-04 | Fuji Electric Co Ltd | Recognizing device for plural patterns |
| JPS5965709A (ja) * | 1982-10-07 | 1984-04-14 | Kawasaki Steel Corp | ストリツプエツジ部の厚さプロフイ−ル測定方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162250A (ja) * | 2004-12-02 | 2006-06-22 | Ushio Inc | フィルムワークのパターン検査装置 |
| JP2007071731A (ja) * | 2005-09-07 | 2007-03-22 | Dainippon Printing Co Ltd | 撮像方法及び撮像装置 |
| WO2018012192A1 (ja) * | 2016-07-12 | 2018-01-18 | 吉野石膏株式会社 | 検査方法、検査・通知方法、該検査方法を含む製造方法、検査装置及び製造装置 |
| JPWO2018012192A1 (ja) * | 2016-07-12 | 2019-04-25 | 吉野石膏株式会社 | 検査方法、検査・通知方法、該検査方法を含む製造方法、検査装置及び製造装置 |
| US10830707B2 (en) | 2016-07-12 | 2020-11-10 | Yoshino Gypsum Co., Ltd. | Inspection method, inspection and reporting method, manufacturing method including the inspection method, inspection apparatus, and manufacturing apparatus |
| AU2017296488B2 (en) * | 2016-07-12 | 2021-10-28 | Yoshino Gypsum Co., Ltd. | Inspection method, inspection/notification method, manufacturing method including inspection method, inspection apparatus, and manufacturing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0459563B2 (enrdf_load_stackoverflow) | 1992-09-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |