JPH0458884B2 - - Google Patents

Info

Publication number
JPH0458884B2
JPH0458884B2 JP9012885A JP9012885A JPH0458884B2 JP H0458884 B2 JPH0458884 B2 JP H0458884B2 JP 9012885 A JP9012885 A JP 9012885A JP 9012885 A JP9012885 A JP 9012885A JP H0458884 B2 JPH0458884 B2 JP H0458884B2
Authority
JP
Japan
Prior art keywords
measured
focusing
output
signal
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9012885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61247910A (ja
Inventor
Akio Atsuta
Yoshibumi Nishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9012885A priority Critical patent/JPS61247910A/ja
Priority to FR8515821A priority patent/FR2572515B1/fr
Priority to GB08526374A priority patent/GB2167262B/en
Priority to DE3538062A priority patent/DE3538062C2/de
Publication of JPS61247910A publication Critical patent/JPS61247910A/ja
Priority to US07/218,447 priority patent/US4830498A/en
Publication of JPH0458884B2 publication Critical patent/JPH0458884B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP9012885A 1984-10-25 1985-04-26 距離測定方法 Granted JPS61247910A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP9012885A JPS61247910A (ja) 1985-04-26 1985-04-26 距離測定方法
FR8515821A FR2572515B1 (fr) 1984-10-25 1985-10-24 Dispositif de detection de position
GB08526374A GB2167262B (en) 1984-10-25 1985-10-25 A position detecting device
DE3538062A DE3538062C2 (de) 1984-10-25 1985-10-25 Positionserfassungsgerät
US07/218,447 US4830498A (en) 1984-10-25 1988-07-12 Position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9012885A JPS61247910A (ja) 1985-04-26 1985-04-26 距離測定方法

Publications (2)

Publication Number Publication Date
JPS61247910A JPS61247910A (ja) 1986-11-05
JPH0458884B2 true JPH0458884B2 (enrdf_load_stackoverflow) 1992-09-18

Family

ID=13989867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9012885A Granted JPS61247910A (ja) 1984-10-25 1985-04-26 距離測定方法

Country Status (1)

Country Link
JP (1) JPS61247910A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654231B2 (ja) * 1986-12-18 1994-07-20 株式会社ミツトヨ 非接触変位計

Also Published As

Publication number Publication date
JPS61247910A (ja) 1986-11-05

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