JPH0454964B2 - - Google Patents

Info

Publication number
JPH0454964B2
JPH0454964B2 JP58014054A JP1405483A JPH0454964B2 JP H0454964 B2 JPH0454964 B2 JP H0454964B2 JP 58014054 A JP58014054 A JP 58014054A JP 1405483 A JP1405483 A JP 1405483A JP H0454964 B2 JPH0454964 B2 JP H0454964B2
Authority
JP
Japan
Prior art keywords
wafer
sample
scanning
temperature distribution
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58014054A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59139624A (ja
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58014054A priority Critical patent/JPS59139624A/ja
Publication of JPS59139624A publication Critical patent/JPS59139624A/ja
Publication of JPH0454964B2 publication Critical patent/JPH0454964B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0436—
    • H10P95/90—

Landscapes

  • Recrystallisation Techniques (AREA)
JP58014054A 1983-01-31 1983-01-31 試料の加熱方法 Granted JPS59139624A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58014054A JPS59139624A (ja) 1983-01-31 1983-01-31 試料の加熱方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58014054A JPS59139624A (ja) 1983-01-31 1983-01-31 試料の加熱方法

Publications (2)

Publication Number Publication Date
JPS59139624A JPS59139624A (ja) 1984-08-10
JPH0454964B2 true JPH0454964B2 (OSRAM) 1992-09-01

Family

ID=11850370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58014054A Granted JPS59139624A (ja) 1983-01-31 1983-01-31 試料の加熱方法

Country Status (1)

Country Link
JP (1) JPS59139624A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080173620A1 (en) * 2005-09-26 2008-07-24 Ultratech, Inc. Apparatuses and methods for irradiating a substrate to avoid substrate edge damage
US10196678B2 (en) 2014-10-06 2019-02-05 ALVEO Technologies Inc. System and method for detection of nucleic acids
CA3037494A1 (en) 2016-09-23 2018-03-29 Alveo Technologies, Inc. Methods and compositions for detecting analytes
JP6837202B2 (ja) * 2017-01-23 2021-03-03 パナソニックＩｐマネジメント株式会社 基材加熱装置および方法および電子デバイスの製造方法
EP3899022A4 (en) 2018-12-20 2023-03-01 Alveo Technologies Inc. PORTABLE IMPEDANCE-BASED DIAGNOSTIC TEST SYSTEM FOR DETECTING ANALYTES
US12472492B2 (en) 2020-08-14 2025-11-18 Alveo Technologies, Inc. Systems and methods of sample depositing and testing

Also Published As

Publication number Publication date
JPS59139624A (ja) 1984-08-10

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