JPH0133937B2 - - Google Patents

Info

Publication number
JPH0133937B2
JPH0133937B2 JP54156786A JP15678679A JPH0133937B2 JP H0133937 B2 JPH0133937 B2 JP H0133937B2 JP 54156786 A JP54156786 A JP 54156786A JP 15678679 A JP15678679 A JP 15678679A JP H0133937 B2 JPH0133937 B2 JP H0133937B2
Authority
JP
Japan
Prior art keywords
wafer
semiconductor wafer
linear
length
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54156786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5680138A (en
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP15678679A priority Critical patent/JPS5680138A/ja
Publication of JPS5680138A publication Critical patent/JPS5680138A/ja
Publication of JPH0133937B2 publication Critical patent/JPH0133937B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • H10P34/422—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
JP15678679A 1979-12-05 1979-12-05 Manufacture of semiconductor device Granted JPS5680138A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15678679A JPS5680138A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15678679A JPS5680138A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5680138A JPS5680138A (en) 1981-07-01
JPH0133937B2 true JPH0133937B2 (OSRAM) 1989-07-17

Family

ID=15635271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15678679A Granted JPS5680138A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5680138A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56108231A (en) * 1980-02-01 1981-08-27 Ushio Inc Annealing method of semiconductor wafer
JPS58176929A (ja) * 1982-04-09 1983-10-17 Fujitsu Ltd 半導体装置の製造方法
US5424244A (en) 1992-03-26 1995-06-13 Semiconductor Energy Laboratory Co., Ltd. Process for laser processing and apparatus for use in the same
US6531681B1 (en) * 2000-03-27 2003-03-11 Ultratech Stepper, Inc. Apparatus having line source of radiant energy for exposing a substrate
US8501638B1 (en) * 2012-04-27 2013-08-06 Ultratech, Inc. Laser annealing scanning methods with reduced annealing non-uniformities

Also Published As

Publication number Publication date
JPS5680138A (en) 1981-07-01

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