JPH0454200Y2 - - Google Patents
Info
- Publication number
- JPH0454200Y2 JPH0454200Y2 JP1984196908U JP19690884U JPH0454200Y2 JP H0454200 Y2 JPH0454200 Y2 JP H0454200Y2 JP 1984196908 U JP1984196908 U JP 1984196908U JP 19690884 U JP19690884 U JP 19690884U JP H0454200 Y2 JPH0454200 Y2 JP H0454200Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- plasma processing
- plasma
- cleaning
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 18
- 239000002904 solvent Substances 0.000 claims description 15
- 238000009832 plasma treatment Methods 0.000 claims description 8
- 238000009423 ventilation Methods 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 21
- 239000007789 gas Substances 0.000 description 12
- 239000012495 reaction gas Substances 0.000 description 6
- 238000010926 purge Methods 0.000 description 5
- 238000005238 degreasing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000565 sealant Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Separation Of Particles Using Liquids (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984196908U JPH0454200Y2 (ru) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984196908U JPH0454200Y2 (ru) | 1984-12-28 | 1984-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116741U JPS61116741U (ru) | 1986-07-23 |
| JPH0454200Y2 true JPH0454200Y2 (ru) | 1992-12-18 |
Family
ID=30754839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984196908U Expired JPH0454200Y2 (ru) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454200Y2 (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108886866B (zh) * | 2016-03-22 | 2021-04-27 | 皇家飞利浦有限公司 | 用于处理表面的冷等离子体设备 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50153073A (ru) * | 1974-05-31 | 1975-12-09 |
-
1984
- 1984-12-28 JP JP1984196908U patent/JPH0454200Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50153073A (ru) * | 1974-05-31 | 1975-12-09 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61116741U (ru) | 1986-07-23 |
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