JPH0453254B2 - - Google Patents
Info
- Publication number
- JPH0453254B2 JPH0453254B2 JP60035655A JP3565585A JPH0453254B2 JP H0453254 B2 JPH0453254 B2 JP H0453254B2 JP 60035655 A JP60035655 A JP 60035655A JP 3565585 A JP3565585 A JP 3565585A JP H0453254 B2 JPH0453254 B2 JP H0453254B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- image
- autocorrelation
- core material
- same shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000011162 core material Substances 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 239000013307 optical fiber Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60035655A JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60035655A JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61194337A JPS61194337A (ja) | 1986-08-28 |
| JPH0453254B2 true JPH0453254B2 (ru) | 1992-08-26 |
Family
ID=12447889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60035655A Granted JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194337A (ru) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016157289A1 (ja) * | 2015-03-27 | 2016-10-06 | 三菱電機株式会社 | 検出装置 |
| WO2021014645A1 (ja) * | 2019-07-25 | 2021-01-28 | 三菱電機株式会社 | 検査装置及び方法、並びにプログラム及び記録媒体 |
-
1985
- 1985-02-25 JP JP60035655A patent/JPS61194337A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61194337A (ja) | 1986-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1115556C (zh) | 用于跟踪和检查边缘或者边界的方法以及设备 | |
| KR100513111B1 (ko) | 용접이음선의광학검사를위한방법및장치 | |
| JP3373831B2 (ja) | 試験片の伸び測定方法及び装置 | |
| EP0532257B1 (en) | Weld bead quality determining apparatus | |
| JP2009145774A (ja) | レーザ走査型顕微鏡及びその表面形状の測定方法 | |
| JPH0236894B2 (ru) | ||
| JP2000111490A (ja) | 塗装面の検出装置 | |
| JPH03295408A (ja) | 凹凸面の検査方法およびその装置 | |
| JP7336294B2 (ja) | ボンディングワイヤの検査装置、ボンディングワイヤの検査方法、及びボンディングワイヤの検査プログラム | |
| JPH0453254B2 (ru) | ||
| JPS6128094B2 (ru) | ||
| JP2010085165A (ja) | 表面検査装置および表面検査方法 | |
| JPH0787378A (ja) | 合焦検出装置 | |
| JP2009229221A (ja) | 光学デバイス欠陥検査方法及び光学デバイス欠陥検査装置 | |
| JP2965370B2 (ja) | 欠陥検出装置 | |
| JPH10206127A (ja) | 鋼帯溶接部の形状計測装置 | |
| JP2005030848A (ja) | 表面検査のためのシミュレーション方法及び表面検査装置 | |
| JPS6325871B2 (ru) | ||
| JP3340879B2 (ja) | 表面欠陥検出方法および装置 | |
| JPH03118975A (ja) | 溶接装置 | |
| JPH04160304A (ja) | 板幅方向反り検出装置 | |
| JPH0413070B2 (ru) | ||
| KR20230014686A (ko) | 표면을 광학적으로 검사하기 위한 방법 및 검사 장치 | |
| JPH085350A (ja) | 溶接開先位置及び形状の測定方法 | |
| JPH041847B2 (ru) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19930223 |