JPH0453254B2 - - Google Patents
Info
- Publication number
- JPH0453254B2 JPH0453254B2 JP60035655A JP3565585A JPH0453254B2 JP H0453254 B2 JPH0453254 B2 JP H0453254B2 JP 60035655 A JP60035655 A JP 60035655A JP 3565585 A JP3565585 A JP 3565585A JP H0453254 B2 JPH0453254 B2 JP H0453254B2
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- image
- autocorrelation
- core material
- same shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000011162 core material Substances 0.000 description 26
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 239000013307 optical fiber Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001131 transforming effect Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Image Analysis (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60035655A JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60035655A JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61194337A JPS61194337A (ja) | 1986-08-28 |
| JPH0453254B2 true JPH0453254B2 (ru) | 1992-08-26 |
Family
ID=12447889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60035655A Granted JPS61194337A (ja) | 1985-02-25 | 1985-02-25 | 同じ形状の繰り返しパターンの良否を判定する方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194337A (ru) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016157289A1 (ja) * | 2015-03-27 | 2016-10-06 | 三菱電機株式会社 | 検出装置 |
| JP7146092B2 (ja) * | 2019-07-25 | 2022-10-03 | 三菱電機株式会社 | 検査装置及び方法、並びにプログラム及び記録媒体 |
-
1985
- 1985-02-25 JP JP60035655A patent/JPS61194337A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61194337A (ja) | 1986-08-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19930223 |