JPH0453252B2 - - Google Patents
Info
- Publication number
- JPH0453252B2 JPH0453252B2 JP60043388A JP4338885A JPH0453252B2 JP H0453252 B2 JPH0453252 B2 JP H0453252B2 JP 60043388 A JP60043388 A JP 60043388A JP 4338885 A JP4338885 A JP 4338885A JP H0453252 B2 JPH0453252 B2 JP H0453252B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- diaphragm
- pellet
- sensitive
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4338885A JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4338885A JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202152A JPS61202152A (ja) | 1986-09-06 |
| JPH0453252B2 true JPH0453252B2 (enrdf_load_stackoverflow) | 1992-08-26 |
Family
ID=12662414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4338885A Granted JPS61202152A (ja) | 1985-03-05 | 1985-03-05 | 湿度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202152A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07117485B2 (ja) * | 1986-09-19 | 1995-12-18 | 三洋電機株式会社 | 湿度検出装置 |
| JPH0814554B2 (ja) * | 1987-02-18 | 1996-02-14 | 三洋電機株式会社 | 湿度検出装置 |
| CN115523961B (zh) * | 2022-11-03 | 2023-02-28 | 南京元感微电子有限公司 | 一种气体与电容式压力传感器及其加工方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5028784U (enrdf_load_stackoverflow) * | 1973-07-09 | 1975-04-02 | ||
| JPS587179B2 (ja) * | 1974-10-14 | 1983-02-08 | ジドウシヤコウガイアンゼンキキギジユツケンキユウクミアイ | 半導体歪ゲ−ジ式圧力センサ |
| JPS54158289A (en) * | 1978-06-05 | 1979-12-13 | Hitachi Ltd | Humidity detector |
-
1985
- 1985-03-05 JP JP4338885A patent/JPS61202152A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61202152A (ja) | 1986-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |