JPS61202152A - 湿度検出装置 - Google Patents

湿度検出装置

Info

Publication number
JPS61202152A
JPS61202152A JP4338885A JP4338885A JPS61202152A JP S61202152 A JPS61202152 A JP S61202152A JP 4338885 A JP4338885 A JP 4338885A JP 4338885 A JP4338885 A JP 4338885A JP S61202152 A JPS61202152 A JP S61202152A
Authority
JP
Japan
Prior art keywords
moisture
pellet
diaphragm
sensitive
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4338885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0453252B2 (enrdf_load_stackoverflow
Inventor
Toshihiko Nishimura
俊彦 西村
Sadao Sakamoto
阪本　貞夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP4338885A priority Critical patent/JPS61202152A/ja
Publication of JPS61202152A publication Critical patent/JPS61202152A/ja
Publication of JPH0453252B2 publication Critical patent/JPH0453252B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP4338885A 1985-03-05 1985-03-05 湿度検出装置 Granted JPS61202152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4338885A JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4338885A JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Publications (2)

Publication Number Publication Date
JPS61202152A true JPS61202152A (ja) 1986-09-06
JPH0453252B2 JPH0453252B2 (enrdf_load_stackoverflow) 1992-08-26

Family

ID=12662414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4338885A Granted JPS61202152A (ja) 1985-03-05 1985-03-05 湿度検出装置

Country Status (1)

Country Link
JP (1) JPS61202152A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378049A (ja) * 1986-09-19 1988-04-08 Sanyo Electric Co Ltd 湿度検出装置
JPS63201561A (ja) * 1987-02-18 1988-08-19 Sanyo Electric Co Ltd 湿度検出装置
CN115523961A (zh) * 2022-11-03 2022-12-27 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (enrdf_load_stackoverflow) * 1973-07-09 1975-04-02
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028784U (enrdf_load_stackoverflow) * 1973-07-09 1975-04-02
JPS5143980A (ja) * 1974-10-14 1976-04-15 Automobile Antipollution Handotaihizumigeejishikiatsuryokusensa
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6378049A (ja) * 1986-09-19 1988-04-08 Sanyo Electric Co Ltd 湿度検出装置
JPS63201561A (ja) * 1987-02-18 1988-08-19 Sanyo Electric Co Ltd 湿度検出装置
CN115523961A (zh) * 2022-11-03 2022-12-27 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法
CN115523961B (zh) * 2022-11-03 2023-02-28 南京元感微电子有限公司 一种气体与电容式压力传感器及其加工方法

Also Published As

Publication number Publication date
JPH0453252B2 (enrdf_load_stackoverflow) 1992-08-26

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees