JPH0452958Y2 - - Google Patents
Info
- Publication number
- JPH0452958Y2 JPH0452958Y2 JP2678687U JP2678687U JPH0452958Y2 JP H0452958 Y2 JPH0452958 Y2 JP H0452958Y2 JP 2678687 U JP2678687 U JP 2678687U JP 2678687 U JP2678687 U JP 2678687U JP H0452958 Y2 JPH0452958 Y2 JP H0452958Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- layer
- edge
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 238000005530 etching Methods 0.000 claims description 9
- 239000002184 metal Substances 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 238000000149 argon plasma sintering Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 239000005083 Zinc sulfide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Exposure Or Original Feeding In Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2678687U JPH0452958Y2 (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2678687U JPH0452958Y2 (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63134495U JPS63134495U (enrdf_load_stackoverflow) | 1988-09-02 |
| JPH0452958Y2 true JPH0452958Y2 (enrdf_load_stackoverflow) | 1992-12-11 |
Family
ID=30828194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2678687U Expired JPH0452958Y2 (enrdf_load_stackoverflow) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452958Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-24 JP JP2678687U patent/JPH0452958Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63134495U (enrdf_load_stackoverflow) | 1988-09-02 |
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