JPH0452681Y2 - - Google Patents
Info
- Publication number
- JPH0452681Y2 JPH0452681Y2 JP1986027177U JP2717786U JPH0452681Y2 JP H0452681 Y2 JPH0452681 Y2 JP H0452681Y2 JP 1986027177 U JP1986027177 U JP 1986027177U JP 2717786 U JP2717786 U JP 2717786U JP H0452681 Y2 JPH0452681 Y2 JP H0452681Y2
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- plane mirror
- frequency inductively
- spectrometer
- condensing lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986027177U JPH0452681Y2 (enrdf_load_stackoverflow) | 1986-02-26 | 1986-02-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986027177U JPH0452681Y2 (enrdf_load_stackoverflow) | 1986-02-26 | 1986-02-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62140438U JPS62140438U (enrdf_load_stackoverflow) | 1987-09-04 |
JPH0452681Y2 true JPH0452681Y2 (enrdf_load_stackoverflow) | 1992-12-10 |
Family
ID=30828958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986027177U Expired JPH0452681Y2 (enrdf_load_stackoverflow) | 1986-02-26 | 1986-02-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0452681Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5866839A (ja) * | 1981-10-16 | 1983-04-21 | Hitachi Ltd | 発光分光分析装置 |
-
1986
- 1986-02-26 JP JP1986027177U patent/JPH0452681Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62140438U (enrdf_load_stackoverflow) | 1987-09-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5581350A (en) | Method and system for calibrating an ellipsometer | |
TWI388936B (zh) | 光罩蝕刻之終點偵測 | |
US7230701B2 (en) | Compact spectroscopic ellipsometer | |
US5608526A (en) | Focused beam spectroscopic ellipsometry method and system | |
JP2020517093A (ja) | エッチング処理監視のための高度先進光センサー、システム及び方法 | |
US20070258092A1 (en) | Optical measurement device and method | |
JPH08210982A (ja) | 誘導プラズマ光源からの選択可能な放射を持つスペクトロメータ | |
TWI512393B (zh) | 光罩製造應用中之用於蝕刻石英基板的裝置及方法 | |
KR102410496B1 (ko) | 반사성 종료점 검출을 하는 에칭 처리 시스템 | |
HK90694A (en) | Spectrometer using concave holographic diffraction grating | |
JPS63127133A (ja) | 分光楕円偏光計用の試料照明装置 | |
CN104101485A (zh) | 检测凹面光栅分辨率和衍射效率的装置及方法 | |
US5066127A (en) | Stigmatic imaging with spherical concave diffraction gratings | |
TW200947144A (en) | Lithographic apparatus and contamination detection method | |
JP2005530152A (ja) | 空間分解能の高い色消し分光偏光解析器 | |
JPH0452681Y2 (enrdf_load_stackoverflow) | ||
JP3427085B2 (ja) | エッチング終点検出方法 | |
CN108731809A (zh) | 原子吸收光谱仪及系统 | |
JP2724541B2 (ja) | Icp発光分光分析装置 | |
JP3498689B2 (ja) | モノクロ線源励起用モノクロメータ及び蛍光x線分析装置 | |
JPH0443998A (ja) | X線分析装置,微小部x線回折装置,蛍光x線分析装置及び,x線光電子分析装置 | |
KR20050024343A (ko) | 고 공간해상도를 가지는 아크로메틱 분광 타원분석기 | |
JPS6038209Y2 (ja) | 分析計 | |
CN120176546A (zh) | 一种椭偏测量系统及测量方法 | |
JPH0613480Y2 (ja) | 顕微赤外反射吸収スペクトル測定装置 |