JPH0451669B2 - - Google Patents
Info
- Publication number
- JPH0451669B2 JPH0451669B2 JP75585A JP75585A JPH0451669B2 JP H0451669 B2 JPH0451669 B2 JP H0451669B2 JP 75585 A JP75585 A JP 75585A JP 75585 A JP75585 A JP 75585A JP H0451669 B2 JPH0451669 B2 JP H0451669B2
- Authority
- JP
- Japan
- Prior art keywords
- panel
- cryogenerator
- enclosure
- pump according
- conductance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005086 pumping Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 230000001965 increasing effect Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000004323 axial length Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB848400349A GB8400349D0 (en) | 1984-01-07 | 1984-01-07 | Cryogenic pumps |
| GB8400349 | 1984-01-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60228779A JPS60228779A (ja) | 1985-11-14 |
| JPH0451669B2 true JPH0451669B2 (OSRAM) | 1992-08-19 |
Family
ID=10554663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP75585A Granted JPS60228779A (ja) | 1984-01-07 | 1985-01-07 | クライオジエネレ−タポンプの改良 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS60228779A (OSRAM) |
| DE (1) | DE3500320A1 (OSRAM) |
| FR (1) | FR2557930A1 (OSRAM) |
| GB (2) | GB8400349D0 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8526191D0 (en) * | 1985-10-23 | 1985-11-27 | Boc Group Plc | Cryopumps |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
| DE1816981A1 (de) * | 1968-01-02 | 1969-08-21 | Internat Res & Dev Company Ltd | Kryogenpumpe |
| DE2455712A1 (de) * | 1974-11-25 | 1976-08-12 | Eckhard Kellner | Cryo-sorptionspumpe |
| DE2620880C2 (de) * | 1976-05-11 | 1984-07-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
| GB1603527A (en) * | 1978-05-12 | 1981-11-25 | Sciex Inc | Multiple stage cryogenic pump and method of pumping |
| DE2830943C2 (de) * | 1978-07-14 | 1986-06-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpenanordnung |
| US4311018A (en) * | 1979-12-17 | 1982-01-19 | Varian Associates, Inc. | Cryogenic pump |
| DE3216591A1 (de) * | 1982-05-04 | 1983-11-10 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe mit jalousieartigem baffle |
| US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
| US4446702A (en) * | 1983-02-14 | 1984-05-08 | Helix Technology Corporation | Multiport cryopump |
| US4449373A (en) * | 1983-02-28 | 1984-05-22 | Helix Technology Corporation | Reduced vacuum cryopump |
-
1984
- 1984-01-07 GB GB848400349A patent/GB8400349D0/en active Pending
-
1985
- 1985-01-04 FR FR8500096A patent/FR2557930A1/fr active Pending
- 1985-01-07 DE DE19853500320 patent/DE3500320A1/de not_active Ceased
- 1985-01-07 JP JP75585A patent/JPS60228779A/ja active Granted
- 1985-01-07 GB GB08500291A patent/GB2153914B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10006451B2 (en) | 2015-03-31 | 2018-06-26 | Sumitomo Heavy Industries, Ltd. | Cryopump |
Also Published As
| Publication number | Publication date |
|---|---|
| GB8400349D0 (en) | 1984-02-08 |
| FR2557930A1 (fr) | 1985-07-12 |
| GB8500291D0 (en) | 1985-02-13 |
| DE3500320A1 (de) | 1985-08-01 |
| GB2153914B (en) | 1987-08-05 |
| JPS60228779A (ja) | 1985-11-14 |
| GB2153914A (en) | 1985-08-29 |
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