JPH0450701B2 - - Google Patents

Info

Publication number
JPH0450701B2
JPH0450701B2 JP60238889A JP23888985A JPH0450701B2 JP H0450701 B2 JPH0450701 B2 JP H0450701B2 JP 60238889 A JP60238889 A JP 60238889A JP 23888985 A JP23888985 A JP 23888985A JP H0450701 B2 JPH0450701 B2 JP H0450701B2
Authority
JP
Japan
Prior art keywords
voltage
source
chamber
nozzle
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60238889A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6298550A (ja
Inventor
Tokuo Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP60238889A priority Critical patent/JPS6298550A/ja
Publication of JPS6298550A publication Critical patent/JPS6298550A/ja
Publication of JPH0450701B2 publication Critical patent/JPH0450701B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP60238889A 1985-10-25 1985-10-25 放電型イオン源 Granted JPS6298550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60238889A JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60238889A JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Publications (2)

Publication Number Publication Date
JPS6298550A JPS6298550A (ja) 1987-05-08
JPH0450701B2 true JPH0450701B2 (enExample) 1992-08-17

Family

ID=17036772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60238889A Granted JPS6298550A (ja) 1985-10-25 1985-10-25 放電型イオン源

Country Status (1)

Country Link
JP (1) JPS6298550A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8616940D0 (en) * 1986-07-11 1986-08-20 Vg Instr Group Discharge ionization mass spectrometer

Also Published As

Publication number Publication date
JPS6298550A (ja) 1987-05-08

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