JPH0449687Y2 - - Google Patents
Info
- Publication number
- JPH0449687Y2 JPH0449687Y2 JP5768686U JP5768686U JPH0449687Y2 JP H0449687 Y2 JPH0449687 Y2 JP H0449687Y2 JP 5768686 U JP5768686 U JP 5768686U JP 5768686 U JP5768686 U JP 5768686U JP H0449687 Y2 JPH0449687 Y2 JP H0449687Y2
- Authority
- JP
- Japan
- Prior art keywords
- purge
- fluid
- flow path
- flow rate
- control valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 53
- 239000012530 fluid Substances 0.000 claims description 42
- 238000005259 measurement Methods 0.000 claims description 12
- 238000011144 upstream manufacturing Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Pipeline Systems (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5768686U JPH0449687Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-17 | 1986-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5768686U JPH0449687Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-17 | 1986-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62175311U JPS62175311U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-07 |
| JPH0449687Y2 true JPH0449687Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-11-24 |
Family
ID=30887622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5768686U Expired JPH0449687Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-17 | 1986-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449687Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08226879A (ja) * | 1995-02-21 | 1996-09-03 | Horiba Ltd | ガスサンプリング装置 |
| JP2007024730A (ja) * | 2005-07-19 | 2007-02-01 | Tsukasa Sokken Co Ltd | ラミナー型排気ガス流量計を用いた希釈排気サンプリング装置及び希釈排気サンプリング方法並びに加熱・冷却サージチューブ装置 |
-
1986
- 1986-04-17 JP JP5768686U patent/JPH0449687Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08226879A (ja) * | 1995-02-21 | 1996-09-03 | Horiba Ltd | ガスサンプリング装置 |
| JP2007024730A (ja) * | 2005-07-19 | 2007-02-01 | Tsukasa Sokken Co Ltd | ラミナー型排気ガス流量計を用いた希釈排気サンプリング装置及び希釈排気サンプリング方法並びに加熱・冷却サージチューブ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62175311U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-07 |