JPH0448175B2 - - Google Patents
Info
- Publication number
- JPH0448175B2 JPH0448175B2 JP60012688A JP1268885A JPH0448175B2 JP H0448175 B2 JPH0448175 B2 JP H0448175B2 JP 60012688 A JP60012688 A JP 60012688A JP 1268885 A JP1268885 A JP 1268885A JP H0448175 B2 JPH0448175 B2 JP H0448175B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- signal
- sensing
- thin film
- sensing parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 6
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60012688A JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61173113A JPS61173113A (ja) | 1986-08-04 |
| JPH0448175B2 true JPH0448175B2 (enEXAMPLES) | 1992-08-06 |
Family
ID=11812313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60012688A Granted JPS61173113A (ja) | 1985-01-28 | 1985-01-28 | 磁気回転センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173113A (enEXAMPLES) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0682268A (ja) * | 1991-02-28 | 1994-03-22 | Japan Servo Co Ltd | 磁気式位置検出装置 |
| EP1052473B1 (fr) * | 1997-12-22 | 2003-05-02 | Brown & Sharpe Tesa S.A. | Dispositifs de mesure magnétique avec reduction de la dissipation d'énergie ou mode de veille |
| JP4000056B2 (ja) * | 2000-06-27 | 2007-10-31 | テーザ エスエイ | 磁気抵抗電極式寸法測定装置 |
| JP4487093B2 (ja) * | 2004-02-02 | 2010-06-23 | 日本電産サンキョー株式会社 | 磁気センサ |
| JP4921327B2 (ja) * | 2007-11-27 | 2012-04-25 | シーケーディ株式会社 | 磁気リニア測定装置 |
| WO2010150725A1 (ja) * | 2009-06-24 | 2010-12-29 | アルプス電気株式会社 | 磁気検出装置 |
| JP2015045529A (ja) | 2013-08-27 | 2015-03-12 | Tdk株式会社 | 回転磁界センサ |
-
1985
- 1985-01-28 JP JP60012688A patent/JPS61173113A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61173113A (ja) | 1986-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4413296A (en) | Thin film magnetoresistive head | |
| US4429276A (en) | Magnetoresistive displacement sensor and signal reprocessing circuits therefor | |
| JPH04290979A (ja) | 磁気センサ、磁気センサを持つ位置検出装置および磁気センサを利用したトルク検出装置、モータ制御装置、あるいはこのトルク検出装置を有する電動パワーステアリング装置 | |
| JPH0448175B2 (enEXAMPLES) | ||
| EP0910802A2 (en) | Magnetic field sensor comprising a wheatstone bridge | |
| JPS58106462A (ja) | 回転検出装置 | |
| JPH0350965B2 (enEXAMPLES) | ||
| JPH0151127B2 (enEXAMPLES) | ||
| JPS63202979A (ja) | エンコ−ダ用磁気センサ | |
| JP3308123B2 (ja) | 磁気抵抗効果センサ | |
| JPH0820271B2 (ja) | 位置や速度を検出する装置 | |
| JPH06147816A (ja) | 角度センサ | |
| JPS59112422A (ja) | 磁気抵抗効果型磁気ヘツド | |
| JPS625284B2 (enEXAMPLES) | ||
| JPS59142417A (ja) | 磁気検出装置 | |
| JPS61290377A (ja) | 磁気抵抗効果型センサ | |
| JPS58154680A (ja) | 磁気センサ | |
| JP2707850B2 (ja) | 磁気抵抗素子 | |
| JPS62266479A (ja) | 薄膜磁気センサ | |
| JP2508345B2 (ja) | 位置検出装置 | |
| JPS6280572A (ja) | 磁気検出器 | |
| JP2620943B2 (ja) | 無接触形ポテンショメータ | |
| JP2582778Y2 (ja) | ２相出力磁性薄膜磁気抵抗素子 | |
| JPH01265113A (ja) | 磁気エンコーダ | |
| JPH0323872B2 (enEXAMPLES) |