JPH044749B2 - - Google Patents
Info
- Publication number
- JPH044749B2 JPH044749B2 JP21099486A JP21099486A JPH044749B2 JP H044749 B2 JPH044749 B2 JP H044749B2 JP 21099486 A JP21099486 A JP 21099486A JP 21099486 A JP21099486 A JP 21099486A JP H044749 B2 JPH044749 B2 JP H044749B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- boat
- opening
- jacket
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000000376 reactant Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 description 17
- 238000009792 diffusion process Methods 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21099486A JPS6366928A (ja) | 1986-09-08 | 1986-09-08 | 熱処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21099486A JPS6366928A (ja) | 1986-09-08 | 1986-09-08 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6366928A JPS6366928A (ja) | 1988-03-25 |
JPH044749B2 true JPH044749B2 (de) | 1992-01-29 |
Family
ID=16598567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21099486A Granted JPS6366928A (ja) | 1986-09-08 | 1986-09-08 | 熱処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6366928A (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2727090B2 (ja) * | 1988-09-29 | 1998-03-11 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
JP2557105B2 (ja) * | 1989-04-28 | 1996-11-27 | 東芝セラミックス株式会社 | 縦型熱処理炉 |
WO1993023713A1 (en) * | 1992-05-15 | 1993-11-25 | Shin-Etsu Quartz Products Co., Ltd. | Vertical heat treatment apparatus and heat insulating material |
-
1986
- 1986-09-08 JP JP21099486A patent/JPS6366928A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6366928A (ja) | 1988-03-25 |
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