JPH0447246U - - Google Patents

Info

Publication number
JPH0447246U
JPH0447246U JP9100090U JP9100090U JPH0447246U JP H0447246 U JPH0447246 U JP H0447246U JP 9100090 U JP9100090 U JP 9100090U JP 9100090 U JP9100090 U JP 9100090U JP H0447246 U JPH0447246 U JP H0447246U
Authority
JP
Japan
Prior art keywords
divided
electrode
voltage
superimposing
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9100090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9100090U priority Critical patent/JPH0447246U/ja
Publication of JPH0447246U publication Critical patent/JPH0447246U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Description

【図面の簡単な説明】
第１図ａはこの考案の一実施例のイオン源の概
略平面構造図、第１図ｂは第１図ａの引出電極の
正面図、第２図は従来例のイオン源の概略平面構
造図である。 ２ａ，２ｂ……引出電極、４，５……高周波電
圧、Ｂ……イオンビーム、Ｖｄ……減速電圧。

Claims (1)

    【実用新案登録請求の範囲】
  1. イオンビーム引出軸を含む平面を分割面として
    引出電極を分割し、各分割電極に逆極性の高周波
    電圧を減速電圧に重畳して印加したイオン源。
JP9100090U 1990-08-29 1990-08-29 Pending JPH0447246U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9100090U JPH0447246U (ja) 1990-08-29 1990-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9100090U JPH0447246U (ja) 1990-08-29 1990-08-29

Publications (1)

Publication Number Publication Date
JPH0447246U true JPH0447246U (ja) 1992-04-22

Family

ID=31826234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9100090U Pending JPH0447246U (ja) 1990-08-29 1990-08-29

Country Status (1)

Country Link
JP (1) JPH0447246U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010528434A (ja) * 2007-05-22 2010-08-19 セムイクウィップ・インコーポレーテッド 分子イオンから成るイオンビームを抽出する方法およびシステム（クラスタイオンビーム抽出システム）

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010528434A (ja) * 2007-05-22 2010-08-19 セムイクウィップ・インコーポレーテッド 分子イオンから成るイオンビームを抽出する方法およびシステム（クラスタイオンビーム抽出システム）

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