JPH0446464B2 - - Google Patents

Info

Publication number
JPH0446464B2
JPH0446464B2 JP59011589A JP1158984A JPH0446464B2 JP H0446464 B2 JPH0446464 B2 JP H0446464B2 JP 59011589 A JP59011589 A JP 59011589A JP 1158984 A JP1158984 A JP 1158984A JP H0446464 B2 JPH0446464 B2 JP H0446464B2
Authority
JP
Japan
Prior art keywords
pressure
force
sensitive
sensitive structure
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59011589A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60154679A (ja
Inventor
Teizo Takahama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59011589A priority Critical patent/JPS60154679A/ja
Publication of JPS60154679A publication Critical patent/JPS60154679A/ja
Publication of JPH0446464B2 publication Critical patent/JPH0446464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59011589A 1984-01-25 1984-01-25 圧覚センサ Granted JPS60154679A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59011589A JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59011589A JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60154679A JPS60154679A (ja) 1985-08-14
JPH0446464B2 true JPH0446464B2 (enExample) 1992-07-30

Family

ID=11782085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59011589A Granted JPS60154679A (ja) 1984-01-25 1984-01-25 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60154679A (enExample)

Also Published As

Publication number Publication date
JPS60154679A (ja) 1985-08-14

Similar Documents

Publication Publication Date Title
EP0735352A2 (en) Force transducer and method of fabrication thereof
US6951142B2 (en) Six-axis force sensor chip and six-axis force sensor using the same
US4695963A (en) Pressure sense recognition control system
US5526700A (en) Six component force gage
EP0311695B1 (en) Force and moment detector using resistor
EP0507582B1 (en) Semiconductor sensor
EP0303875B1 (en) Si crystal force transducer
JPH0446464B2 (enExample)
JP2551625B2 (ja) 半導体加速度センサ
US4884051A (en) Semiconductor diffusion type force sensing apparatus
JPH05281251A (ja) 加速度センサおよびその製造方法
JPS6394690A (ja) 力検出装置
JPH0629815B2 (ja) 圧覚センサ
JPS60154677A (ja) 圧覚センサ
JPH0564863B2 (enExample)
JPH0446463B2 (enExample)
JPH0793445B2 (ja) 圧覚センサ
JPH0612304B2 (ja) 圧覚センサ
JPH0473629B2 (enExample)
JPH0473631B2 (enExample)
JPH0640037B2 (ja) 二次元平面上の力検出装置
JPS60153174A (ja) 圧覚センサ
JPS60153175A (ja) 圧覚センサ
JP2960510B2 (ja) 半導体３軸力覚センサーの起歪体構造
JP2551625C (enExample)