JPH0446194B2 - - Google Patents

Info

Publication number
JPH0446194B2
JPH0446194B2 JP60223726A JP22372685A JPH0446194B2 JP H0446194 B2 JPH0446194 B2 JP H0446194B2 JP 60223726 A JP60223726 A JP 60223726A JP 22372685 A JP22372685 A JP 22372685A JP H0446194 B2 JPH0446194 B2 JP H0446194B2
Authority
JP
Japan
Prior art keywords
cleaning
disk member
disk
chuck
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60223726A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6284970A (ja
Inventor
Kazuhiko Kenmori
Takashi Hibya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60223726A priority Critical patent/JPS6284970A/ja
Publication of JPS6284970A publication Critical patent/JPS6284970A/ja
Publication of JPH0446194B2 publication Critical patent/JPH0446194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP60223726A 1985-10-09 1985-10-09 ディスク部材の洗浄装置 Granted JPS6284970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60223726A JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60223726A JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6284970A JPS6284970A (ja) 1987-04-18
JPH0446194B2 true JPH0446194B2 (en, 2012) 1992-07-29

Family

ID=16802719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60223726A Granted JPS6284970A (ja) 1985-10-09 1985-10-09 ディスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6284970A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1011749A (ja) * 1996-06-27 1998-01-16 Speedfam Co Ltd ディスクの洗浄及び乾燥装置
CN104624539A (zh) * 2015-02-14 2015-05-20 济南大学 一种三爪卡盘式钢丝绳除垢装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107722U (ja) * 1982-12-29 1984-07-20 富士通株式会社 磁気記録媒体の製造装置
JPS608188A (ja) * 1983-06-28 1985-01-17 Nissan Motor Co Ltd ヨツトのセ−ル支持構造

Also Published As

Publication number Publication date
JPS6284970A (ja) 1987-04-18

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