JPH0445236Y2 - - Google Patents

Info

Publication number
JPH0445236Y2
JPH0445236Y2 JP1986153874U JP15387486U JPH0445236Y2 JP H0445236 Y2 JPH0445236 Y2 JP H0445236Y2 JP 1986153874 U JP1986153874 U JP 1986153874U JP 15387486 U JP15387486 U JP 15387486U JP H0445236 Y2 JPH0445236 Y2 JP H0445236Y2
Authority
JP
Japan
Prior art keywords
ray
thin film
transparent thin
window
wafer substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986153874U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359321U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986153874U priority Critical patent/JPH0445236Y2/ja
Publication of JPS6359321U publication Critical patent/JPS6359321U/ja
Application granted granted Critical
Publication of JPH0445236Y2 publication Critical patent/JPH0445236Y2/ja
Expired legal-status Critical Current

Links

JP1986153874U 1986-10-07 1986-10-07 Expired JPH0445236Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986153874U JPH0445236Y2 (enExample) 1986-10-07 1986-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986153874U JPH0445236Y2 (enExample) 1986-10-07 1986-10-07

Publications (2)

Publication Number Publication Date
JPS6359321U JPS6359321U (enExample) 1988-04-20
JPH0445236Y2 true JPH0445236Y2 (enExample) 1992-10-23

Family

ID=31073153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986153874U Expired JPH0445236Y2 (enExample) 1986-10-07 1986-10-07

Country Status (1)

Country Link
JP (1) JPH0445236Y2 (enExample)

Also Published As

Publication number Publication date
JPS6359321U (enExample) 1988-04-20

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