JPH0445236Y2 - - Google Patents
Info
- Publication number
- JPH0445236Y2 JPH0445236Y2 JP1986153874U JP15387486U JPH0445236Y2 JP H0445236 Y2 JPH0445236 Y2 JP H0445236Y2 JP 1986153874 U JP1986153874 U JP 1986153874U JP 15387486 U JP15387486 U JP 15387486U JP H0445236 Y2 JPH0445236 Y2 JP H0445236Y2
- Authority
- JP
- Japan
- Prior art keywords
- ray
- thin film
- transparent thin
- window
- wafer substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 25
- 239000013078 crystal Substances 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000011358 absorbing material Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 21
- 238000005530 etching Methods 0.000 description 17
- 238000005516 engineering process Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986153874U JPH0445236Y2 (enrdf_load_stackoverflow) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986153874U JPH0445236Y2 (enrdf_load_stackoverflow) | 1986-10-07 | 1986-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6359321U JPS6359321U (enrdf_load_stackoverflow) | 1988-04-20 |
| JPH0445236Y2 true JPH0445236Y2 (enrdf_load_stackoverflow) | 1992-10-23 |
Family
ID=31073153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986153874U Expired JPH0445236Y2 (enrdf_load_stackoverflow) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445236Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-10-07 JP JP1986153874U patent/JPH0445236Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6359321U (enrdf_load_stackoverflow) | 1988-04-20 |
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