JPH0443769Y2 - - Google Patents

Info

Publication number
JPH0443769Y2
JPH0443769Y2 JP1986147364U JP14736486U JPH0443769Y2 JP H0443769 Y2 JPH0443769 Y2 JP H0443769Y2 JP 1986147364 U JP1986147364 U JP 1986147364U JP 14736486 U JP14736486 U JP 14736486U JP H0443769 Y2 JPH0443769 Y2 JP H0443769Y2
Authority
JP
Japan
Prior art keywords
stage
heat
guideway
precision
mounting member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986147364U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354009U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986147364U priority Critical patent/JPH0443769Y2/ja
Publication of JPS6354009U publication Critical patent/JPS6354009U/ja
Application granted granted Critical
Publication of JPH0443769Y2 publication Critical patent/JPH0443769Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1986147364U 1986-09-26 1986-09-26 Expired JPH0443769Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986147364U JPH0443769Y2 (en, 2012) 1986-09-26 1986-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986147364U JPH0443769Y2 (en, 2012) 1986-09-26 1986-09-26

Publications (2)

Publication Number Publication Date
JPS6354009U JPS6354009U (en, 2012) 1988-04-11
JPH0443769Y2 true JPH0443769Y2 (en, 2012) 1992-10-15

Family

ID=31060655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986147364U Expired JPH0443769Y2 (en, 2012) 1986-09-26 1986-09-26

Country Status (1)

Country Link
JP (1) JPH0443769Y2 (en, 2012)

Also Published As

Publication number Publication date
JPS6354009U (en, 2012) 1988-04-11

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