JPH0443226B2 - - Google Patents

Info

Publication number
JPH0443226B2
JPH0443226B2 JP59206639A JP20663984A JPH0443226B2 JP H0443226 B2 JPH0443226 B2 JP H0443226B2 JP 59206639 A JP59206639 A JP 59206639A JP 20663984 A JP20663984 A JP 20663984A JP H0443226 B2 JPH0443226 B2 JP H0443226B2
Authority
JP
Japan
Prior art keywords
layer
epitaxial layer
type epitaxial
protective film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59206639A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6184537A (ja
Inventor
Kyoichi Ikeda
Katsumi Isozaki
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP20663984A priority Critical patent/JPS6184537A/ja
Publication of JPS6184537A publication Critical patent/JPS6184537A/ja
Publication of JPH0443226B2 publication Critical patent/JPH0443226B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20663984A 1984-10-02 1984-10-02 容量式センサの製造方法 Granted JPS6184537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20663984A JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20663984A JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6184537A JPS6184537A (ja) 1986-04-30
JPH0443226B2 true JPH0443226B2 (enrdf_load_stackoverflow) 1992-07-15

Family

ID=16526684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20663984A Granted JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6184537A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021153692A1 (ja) * 2020-01-31 2021-08-05 住友金属鉱山株式会社 電磁波吸収粒子、電磁波吸収粒子分散液、電磁波吸収粒子の製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
JP2822486B2 (ja) * 1989-09-27 1998-11-11 株式会社デンソー 感歪センサおよびその製造方法
JP2517467B2 (ja) * 1990-10-05 1996-07-24 山武ハネウエル株式会社 静電容量式圧力センサ
JPH04268725A (ja) * 1991-02-25 1992-09-24 Canon Inc 力学量検出センサおよびその製造方法
DE19903380B4 (de) 1998-02-02 2007-10-18 Denso Corp., Kariya Halbleitersensoren für eine physikalische Grösse und ihre Herstellungsverfahren
JP4238437B2 (ja) 1999-01-25 2009-03-18 株式会社デンソー 半導体力学量センサとその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
US4415948A (en) * 1981-10-13 1983-11-15 United Technologies Corporation Electrostatic bonded, silicon capacitive pressure transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021153692A1 (ja) * 2020-01-31 2021-08-05 住友金属鉱山株式会社 電磁波吸収粒子、電磁波吸収粒子分散液、電磁波吸収粒子の製造方法

Also Published As

Publication number Publication date
JPS6184537A (ja) 1986-04-30

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