JPH0442530A - Ultrasonic cleaning device - Google Patents

Ultrasonic cleaning device

Info

Publication number
JPH0442530A
JPH0442530A JP15028790A JP15028790A JPH0442530A JP H0442530 A JPH0442530 A JP H0442530A JP 15028790 A JP15028790 A JP 15028790A JP 15028790 A JP15028790 A JP 15028790A JP H0442530 A JPH0442530 A JP H0442530A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
material
tank
liquid
surface
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15028790A
Inventor
Takao Takahashi
Yoichi Usui
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To prevent substance separated from the surface a material to be cleaned from re-adhering to the material in cleanser liquid in a cleaning tank by providing a vertical flow generating nozzle for injecting the liquid to the center of a bottom in the tank.
CONSTITUTION: A vertical flow generating nozzle 13 for injecting cleanser liquid 30 upward to the center of a bottom in a cleaning tank 10 is provided in the tank 10. The liquid 30 injected from the nozzle 13 and containing contaminant separated from a material 31 to be cleaned raises as a laminar flow state in the tank 10, and overflows the opening of the tank 10. Thus, the surface of the material 31 is not brought into contact with the liquid 30 containing the contaminant separated from the material 31, but hence the surface of the material 31 is finished in a state without re-adherence of the contaminant substance.
COPYRIGHT: (C)1992,JPO&Japio
JP15028790A 1990-06-08 1990-06-08 Ultrasonic cleaning device Pending JPH0442530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15028790A JPH0442530A (en) 1990-06-08 1990-06-08 Ultrasonic cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15028790A JPH0442530A (en) 1990-06-08 1990-06-08 Ultrasonic cleaning device

Publications (1)

Publication Number Publication Date
JPH0442530A true true JPH0442530A (en) 1992-02-13

Family

ID=15493685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15028790A Pending JPH0442530A (en) 1990-06-08 1990-06-08 Ultrasonic cleaning device

Country Status (1)

Country Link
JP (1) JPH0442530A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5927302A (en) * 1992-04-07 1999-07-27 Fujitsu Limited Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same
DE19742680B4 (en) * 1997-09-26 2006-03-02 Siltronic Ag Cleaning procedures for disc-shaped material
US7208858B2 (en) * 2003-02-04 2007-04-24 Forward Technology A Crest Group Company Ultrasonic cleaning tank

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5927302A (en) * 1992-04-07 1999-07-27 Fujitsu Limited Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same
DE19742680B4 (en) * 1997-09-26 2006-03-02 Siltronic Ag Cleaning procedures for disc-shaped material
US7208858B2 (en) * 2003-02-04 2007-04-24 Forward Technology A Crest Group Company Ultrasonic cleaning tank

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