JP2006013015A - Cleaning device and cleaning method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cleaning device and a cleaning method capable of improving cleaning quality and work efficiency for less occupied space. <P>SOLUTION: The cleaning device comprises a cleaning bath body 2 in which an object 10 to be cleaned is housed, a liquid supplying means 4 which selectively supplies a washing liquid or rinsing liquid from the lower part of the cleaning bath body 2, an ultrasonic vibration device 7 for ultrasonic-vibrating the washing liquid or rinsing liquid stored in the cleaning bath body 2, a liquid discharging means 5 which is provided to the lower part of the cleaning bath body 2 to discharge the washing liquid or rinsing liquid, a shower device 6 for jetting the washing liquid or rinsing liquid to the object 10, and an overflow bath 3 provided to the upper part of the cleaning bath body 2. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cleaning apparatus and a cleaning method, and in particular, it is possible to perform a plurality of cleaning and rinsing processes on an electronic device or the like by using a single cleaning tank body, which is excellent in cleaning quality and work efficiency and saves space. The present invention relates to a cleaning device and a cleaning method.

Electronic devices such as semiconductor silicon wafers, liquid crystal panels, etc., or photomasks for manufacturing these, generally require a high degree of cleanliness. In particular, it is necessary to remove particulate dirt, oily dirt, ionic dirt, corrosive dirt, etc. as much as possible, which may impair the function of the electronic circuit.
The method for cleaning the plurality of stains differs depending on the property of each stain. For this reason, in cleaning electronic devices, the object to be cleaned is cleaned with a cleaning liquid (including pure water) suitable for removing each dirt, and this cleaning liquid is rinsed off with a rinsing liquid (including pure water). ing.

By the way, as a cleaning method, there are a chemical cleaning method in which an object to be cleaned is dipped in a cleaning liquid to remove the dirt, a physical cleaning method in which the dirt is removed by a shower, a water flow, or the like.
In addition, a cleaning method in which a cleaning liquid in which a cleaning agent is diluted is vibrated using ultrasonic waves utilizes the properties of both physical cleaning and chemical cleaning. That is, the maximum cleaning effect can be improved by selecting an appropriate cleaning liquid according to the type of dirt and combining the physical action of ultrasonic vibration and the chemical action of the cleaning liquid. Furthermore, there are advantages such as being able to perform cleaning simply by immersing in a cleaning solution that is ultrasonically vibrated, being able to clean pores and complicated shapes, and facilitating uniform cleaning quality.
Thus, cleaning using ultrasonic vibration has excellent effects, and various cleaning apparatuses have been proposed for the purpose of further enhancing these effects.

For example, the ultrasonic cleaning device of Patent Document 1 has a quartz glass cleaning tank in an outer tank having an ultrasonic vibrator at the bottom and an ultrasonic medium liquid (ultrasonic transmission liquid) in the tank. It has a double tank structure in which is installed, and the bottom of the washing tank is inclined.
This ultrasonic cleaning apparatus can prevent a problem that bubbles generated in the ultrasonic medium liquid by cavitation adhere to the bottom of the cleaning tank and prevent transmission of ultrasonic waves.

In addition, the object to be cleaned immersed in the cleaning liquid needs to be rinsed off (rinsed), but in general, it is transported from the cleaning tank to the rinse tank and immersed in the rinse liquid. A rinse process is performed.
Typical examples of the rinse tank include a QDR (quick dump rinse) tank and an overflow rinse tank.
In the QDR tank, the object to be cleaned, to which the cleaning liquid adheres, is immersed in pure water (rinsing liquid) stored in the rinsing tank, and then the drain port provided in the lower part of the tank is opened to discharge the pure water all at once. At the same time, the cleaning liquid adhering to the object to be cleaned is rinsed off by spraying pure water onto the object to be cleaned with a shower device from above the rinse tank (see Patent Document 2 and FIG. 2).
The overflow rinsing tank is a tank in which pure water is injected from a water supply pipe provided at the lower part of the rinsing tank and is overflowed from the opening above the rinsing tank. The adhering cleaning liquid is rinsed away with pure water flowing upward (see Patent Document 2 and FIG. 3).

Furthermore, a cleaning device in which a dip tank, an ultrasonic vibrator, and a shower device are integrated is also disclosed (see Patent Document 3). This cleaning device has a high-pressure shower device for injecting cleaning liquid, and has an ultrasonic cleaning tank that performs ultrasonic cleaning, a hot air blowing device that heats hot air, and a drying tank that depressurizes the inside. .
According to this apparatus, after performing ultrasonic cleaning for a predetermined time, the pure water in the main body of the cleaning tank is drained, and subsequently, high-pressure shower cleaning can be performed.
Japanese Patent Laid-Open No. 9-24349 (first page, FIGS. 3, 4) Japanese Patent Laid-Open No. 5-299404 (Page 2, FIGS. 2, 3) Japanese Patent Laid-Open No. 2002-126678 (Claims 1-4, FIG. 1)

  However, although the ultrasonic cleaning apparatus described in Patent Document 1 can effectively remove (or peel off) dirt from the object to be cleaned, for example, the object to be cleaned is transferred from the ultrasonic cleaning tank to the rinse tank. When transported, the dirt moves to the rinsing tank in a state where the dirt that has been dropped is included in the cleaning liquid attached to the object to be cleaned. For this reason, even if the article to be cleaned is immersed in a rinse liquid containing minute dirt, the dirt cannot be completely removed from the article to be cleaned. In other words, it is necessary to devise a method that collects dirt diffused in the cleaning liquid in the process and does not bring it into the next process, and unless such treatment is performed, the cleaning quality cannot be improved to a very high level. There was a problem.

The QDR tank described in Patent Document 2 requires only a small amount of pure water to be used for rinsing, and dirt that has been washed away from the object to be cleaned because all the pure water can be discharged from the drain outlet provided at the bottom of the rinse tank. Although it is superior to the overflow rinse tank in that it does not remain in the tank, there is a problem that the rinse performance is inferior to that of the overflow rinse tank because the flow of pure water to the object to be cleaned is small.
In addition, since the overflow rinse tank described in Patent Document 2 flows pure water with respect to the object to be cleaned, the rinse performance is superior to the QDR tank, but a large amount of pure water is required for rinsing, Since all the pure water is not discharged from the lower part of the tank, there is a problem that it is inferior to the QDR tank in that the dirt washed away from the object to be cleaned remains in the tank.
Furthermore, in order to improve the rinsing quality, if an overflow rinsing tank and a QDR tank are to be provided side by side, there is a problem that twice as much space is required and space saving cannot be achieved. Moreover, the work of carrying in / out the object to be washed into each tank for each different rinsing process has caused the work efficiency to deteriorate.

  Although the cleaning apparatus described in Patent Document 3 has an ultrasonic cleaning function and a shower function and is multi-functional, it does not have an overflow rinse function, and the flow of pure water to the object to be cleaned is small. There was room for improvement in rinse performance. In addition, since it does not have a function to replace the cleaning liquid efficiently and without degrading the cleaning quality, it is necessary to install as many cleaning tanks as the number of cleaning liquids to be used, and space saving cannot be achieved. there were.

In particular, in recent years, with the increase in precision of electronic devices, there has been a tendency to increase the number of cleaning steps using a new cleaning liquid for the purpose of further improving the cleaning quality. And according to a new washing | cleaning process, for example, if the washing tank described in patent document 3, and the rinse tank described in patent document 2 are added, unless the tank is arranged in parallel with 5-10 tanks or more In other words, there was a problem that it was not possible to save space. For example, when the cleaning device is installed in a clean room, there is a serious problem that an expensive space cannot be effectively used.
Furthermore, in order to improve the cleaning quality, simply increasing the number of tanks does not solve the problems of the above-described cleaning tank and rinsing tank, and thus there is a problem that a significant improvement in cleaning quality cannot be expected.

  The present invention has been proposed in order to solve the problems of the conventional techniques as described above, and a cleaning apparatus and a cleaning that can improve cleaning quality and work efficiency, and can realize space saving. It aims to provide a method.

In order to achieve the above object, the cleaning apparatus of the present invention comprises a cleaning tank main body for storing an object to be cleaned, a liquid supply means for selectively supplying a cleaning liquid or a rinsing liquid from the lower part of the cleaning tank main body, and the cleaning An ultrasonic vibration device that ultrasonically vibrates the cleaning liquid or rinsing liquid stored in the tank body, a liquid discharge means provided at a lower part of the cleaning tank main body for discharging the cleaning liquid or the rinsing liquid, and the object to be cleaned. , A shower apparatus for injecting a cleaning liquid or a rinsing liquid, and an overflow tank provided at the upper part of the cleaning tank main body.
If it does in this way, ultrasonic cleaning, overflow rinse, and quick dump rinse can be performed continuously using one washing tub body, and high-quality cleaning can be performed in a space-saving state. .
The cleaning liquid refers to a liquid and pure water having a cleaning function, and the rinsing liquid refers to a liquid and pure water having a rinsing function.

In the cleaning processing apparatus of the present invention, the ultrasonic vibration device includes an outer tank in which a bottom portion of the cleaning tank main body is accommodated and immersed in a vibration transmission liquid, and an ultrasonic vibrator provided on a lower surface of the outer tank. It is as a configuration provided.
If it does in this way, the washing tank main part which consists of quartz glass etc. can be used, for example, and the malfunction that the metal ion eluted from a metal ultrasonic vibration board etc. will adhere to a thing to be washed can be prevented.

In the cleaning apparatus of the present invention, a drain outlet is provided on the lower side wall of the cleaning tank main body, and the bottom of the cleaning tank main body is inclined toward the drain outlet.
If it does in this way, the vibration from the ultrasonic vibration apparatus provided in the downward direction of the washing tank main body can be transmitted effectively.

In the cleaning method of the present invention, the cleaning liquid is supplied to the cleaning tank body, the object to be cleaned is ultrasonically cleaned, and then the cleaning liquid is discharged, and the rinsing liquid is supplied to the cleaning tank body. And an overflow rinsing process for overflowing the rinsing liquid, and a quick dump rinsing process for discharging the rinsing liquid from the cleaning tank body and spraying the rinsing liquid onto the object to be cleaned.
Thus, the present invention is also effective as a cleaning method, and ultrasonic cleaning, overflow rinse, and quick dump rinse can be performed continuously, and high-quality cleaning can be performed. In particular, the cleaning tank main body can be maintained in a clean state and the cleaning quality can be improved by discharging the cleaning liquid containing dirt by ultrasonic cleaning.

The cleaning method of the present invention is a method in which the cleaning step, the overflow rinse step and / or the quick dump rinse step are repeated a plurality of times using the cleaning tank body.
In this way, even when the number of cleaning steps using a new cleaning liquid or the like increases, high-quality cleaning can be performed in a space-saving state.

Further, the cleaning method of the present invention is a method of spraying the rinse liquid onto the object to be cleaned and the cleaning tank body when discharging the cleaning liquid.
If it does in this way, the washing | cleaning liquid adhering to the to-be-washed | cleaned object and the washing tank main body can be rinsed off, and rinse quality can be improved.

  As described above, according to the cleaning apparatus and the cleaning method of the present invention, ultrasonic cleaning, overflow rinsing, and quick dump rinsing using different cleaning liquids can be continuously performed using one cleaning tank body. High-quality cleaning can be performed in a space-saving state.

[Cleaning equipment]
Hereinafter, preferred embodiments of a cleaning apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view showing a cross section and a piping system of a cleaning apparatus according to an embodiment of the present invention.
The cleaning device 1 includes a cleaning tank body 2, an overflow tank 3, a liquid supply means 4, a liquid discharge means 5, a shower device 6, and an ultrasonic vibration device 7.

(Cleaning tank body)
The cleaning tank body 2 is a substantially rectangular parallelepiped tank made of, for example, quartz glass, which accommodates an object to be cleaned 10 such as an electronic device. In this way, by using a non-metal material, it is possible to prevent a problem that metal ions eluted from a metal plate or the like adhere to the object to be cleaned 10.
Moreover, the washing tank main body 2 is provided with a drain outlet 21 at the lowest part of the side wall, and the bottom plate 22 is inclined downward about 3 to 4 degrees with respect to the horizontal toward the drain outlet 21. In this way, all the liquid in the tank can be discharged, and bubbles generated by cavitation do not adhere to the bottom plate 22 when the ultrasonic vibration device 7 is operated, so that the transmission efficiency of ultrasonic waves is reduced. Such a problem can be avoided. Note that the inclination angle is not limited to about 3 to 4 °.

The cleaning tank body 2 is provided with a water supply pipe 23 provided with a plurality of water supply ports (not shown) below the object to be cleaned 10, and the cleaning liquid or the rinse liquid is supplied from the water supply pipe 23. Is done.
Although not shown, the object to be cleaned 10 is generally placed or fixed on a mounting table provided inside the cleaning tank body 2, but is not limited to this configuration. A configuration may be adopted in which the cleaning tank body 2 is accommodated while being held by the transfer device.
The cleaning tank body 2 is generally provided with a liquid level gauge (not shown), a thermometer, etc. for detecting the liquid level of the cleaning liquid or the rinsing liquid.

(Overflow tank)
The overflow tank 3 is an annular tank provided at the upper outer edge of the cleaning tank body 2, and collects rinse liquid (including pure water) that overflows from the cleaning tank body 2 when performing overflow rinsing. The collected rinse liquid is discharged to the drain line 52 via the pipe 53.
In the present embodiment, the recovered rinse liquid is processed as waste liquid. However, the present invention is not limited to this. For example, cleaning is performed as a regenerated rinse liquid through a circulation pump and a filter. You may supply to the tank main body 2. FIG.

(Liquid supply means)
The liquid supply means 4 includes a pure water supply line 41 that supplies pure water as a rinse liquid, a cleaning liquid A supply line 42 that supplies the cleaning liquid A, a cleaning liquid B supply line 43 that supplies the cleaning liquid B, and each supply line 41. , 42, 43, solenoid valves 410, 420, 430 provided at the tips of the valves, connection piping 45 connecting the solenoid valves 410, 420, 430 and the filter 44, and a filter 44 connected to the tips of the water supply pipe 23, It is made up of.
If it does in this way, each cleaning liquid and rinse liquid will be supplied freely by opening the electromagnetic valves 410, 420, and 430 according to the cleaning liquid and rinse liquid (in this embodiment, cleaning liquid A, B, pure water) to be supplied. be able to.

Further, an acidic solution, an alkaline solution, functional water (for example, ozone water, hydrogen water, degassed water, etc.) is used as the cleaning liquid, and pure water or the like is generally used as the rinsing liquid.
In this embodiment, the cleaning liquid and the rinsing liquid are supplied from one water supply pipe 23. However, the present invention is not limited to this. For example, each of the supply lines 41, 42, and 43 has a filter 44, respectively. In addition, the water supply pipe 23 may be provided.
Moreover, the washing | cleaning liquid and rinse liquid to be used are not limited to said three liquids, For example, four or more liquids can also be used.

(Liquid discharge means)
The liquid discharge means 5 includes a drain valve 51 made of an electromagnetic valve provided at the drain port 21 of the cleaning tank body 2, a drain line 52 connected to the drain valve 51, a drain line 52, and an overflow tank. 3 is connected to the pipe 53.
In the present embodiment, the used pure water and the cleaning liquids A and B are treated as drainage without being distinguished from each other. However, the drainage treatment may be performed separately.

(Shower device)
The shower device 6 includes a shower nozzle 61 that injects a rinsing liquid onto the object to be cleaned 10, a shower line 62 that supplies the rinsing liquid to the shower nozzle 61, and a booster pump (not shown). Thus, quick dump rinse can be performed by providing the shower device 6.
In addition, the shower nozzle 61 may be configured to spray the rinsing liquid on the inner wall of the cleaning tank body 2. In this manner, when the cleaning liquids A and B are discharged, the rinsing liquid is sprayed on the inner wall of the cleaning tank body 2 and becomes dirty. Can be discharged, and the cleaning quality can be improved.

(Ultrasonic vibration device)
The ultrasonic vibration device 7 includes an ultrasonic vibrator 71 having a frequency of about 500 kHz to 1.5 MHz and an outer tub 72.
The outer tank 72 is filled with water as a vibration transmission liquid, and is stored in a state where the bottom of the cleaning tank main body 2 is immersed in this water.
The ultrasonic vibrator 71 is provided on the bottom surface of the outer tub 72. When ultrasonic vibration is generated, the ultrasonic vibrator 71 is cleaned through the bottom plate of the outer tub 72, water (vibration transmission liquid), and the bottom plate 22 of the cleaning tub main body 2. The cleaning liquid in the tank body 2 can be vibrated. Further, in the present embodiment, for example, the drain port 21 and the drain valve 51 are not located in the transmission path of the ultrasonic vibration, so that it is possible to avoid the problem that the vibration characteristics are lowered due to these.

(Control means)
In addition, the liquid supply means 4, the liquid discharge means 5, the shower device 6 and the ultrasonic vibration device 7 can be operated by manual operation, but are provided with control means (not shown) such as a sequencer, It is advisable to automatically operate according to a predetermined program. In this way, work efficiency can be improved and human error can be prevented.

Next, operation | movement of the washing | cleaning apparatus 1 of this embodiment which consists of the said structure is demonstrated with reference to drawings.
FIG. 2 is a schematic flowchart for explaining the operation of the cleaning apparatus according to the embodiment of the present invention.
In the figure, first, the object to be cleaned 10 is set in the cleaning tank body 2 (step S1), ultrasonic cleaning of the cleaning liquid A (for example, ammonia water) is selected, and the cleaning switch of the control means is turned on.
In this embodiment, the cleaning object 10 is set in the cleaning tank body 2 before the cleaning liquid A is stored in the cleaning tank body 2. However, after the cleaning liquid A is stored in the cleaning tank body 2, the cleaning object A is stored in the cleaning tank body 2. 10 may be set in the cleaning tank body 2.

Next, when the cleaning switch is turned on, the drain valve 51 is closed, and then the electromagnetic valve 420 is opened. The cleaning liquid A flows from the cleaning liquid A supply line 42 through the filter 44 to the water supply pipe 23, It is supplied from the water supply pipe 23 to the cleaning tank body 2 (step S2). Subsequently, when the cleaning liquid A reaches a water level at which the article to be cleaned 10 is completely immersed, the control means inputs a detection signal from the liquid level gauge and closes the electromagnetic valve 420.
Depending on the type of cleaning liquid A (for example, when cleaning liquid A is functional water or the like), the solenoid valve 420 may not be closed and an overflow state may be set.

Next, the ultrasonic vibrator 71 is operated, and the cleaning liquid A supplied to the cleaning tank body 2 is ultrasonically oscillated for a predetermined time to ultrasonically clean the object to be cleaned 10 (step S3).
By this ultrasonic cleaning, dirt corresponding to the cleaning liquid A is washed away (or peeled off) from the object 10 to be cleaned, so that the cleaning liquid A after cleaning contains dirt.

Next, the drain valve 51 is opened, the cleaning liquid A is discharged (step S4), the shower device 6 is operated, and pure water is jetted from the shower nozzle 61 to the object 10 to be cleaned.
In this way, the cleaning liquid A is discharged to the drainage line 52 through the drain port 21 and the cleaning liquid A adhering to the object to be cleaned 10 is rinsed off with pure water. The probability that the dirt contained in A is discarded and the dirt diffused in the cleaning liquid A reattaches to the object to be cleaned 10 can be reduced, and the cleaning quality can be improved.

The shower device 6 also sprays pure water on the inner wall of the cleaning tank body 2 and can rinse off the cleaning liquid A adhering to the inner wall of the cleaning tank body 2. Almost all can be discharged to the drainage line 52.
Further, preferably, the electromagnetic valve 410 is opened for a short time, and the cleaning liquid A in the connection pipe 45 is caused to flow into the cleaning tank body 2 together with the pure water from the pure water supply line 41, together with the pure water from the shower device 6, It is good to discharge to the drainage line 52. In this way, the cleaning liquid A remaining in the connection pipe 45 can be removed.
Subsequently, the shower device 6 is stopped, and after the injected pure water is discharged to the drain line 52, the drain valve 51 is closed. Thereby, the cleaning liquid A can be discharged from the tank of the cleaning tank 2, the surface of the object 10 to be cleaned, and the connection pipe 45.

  Next, the electromagnetic valve 410 of the pure water supply line 41 is opened and pure water is supplied to the cleaning tank main body 2, whereby the object to be cleaned 10 is overflow rinsed for a predetermined time with pure water flowing upward from below. (Step S5). The pure water overflowed from the cleaning tank main body 2 is drained to the drainage line 52 through the pipe 53.

Next, the electromagnetic valve 410 is closed, the drainage valve 51 is opened, the pure water in the cleaning tank body 2 is discharged to the drainage line 52, the shower device 6 is operated, and the pure water is supplied to the object 10 to be cleaned. Inject and perform quick dump rinse (step S6).
Subsequently, the shower device 6 is stopped, and when the pure water in the cleaning tank body 2 is drained to the drain line 52, the drain valve 51 is closed.

Next, ultrasonic cleaning of the cleaning liquid B (for example, ozone water) is selected, and using the cleaning liquid B instead of the cleaning liquid A, the above steps S2 to S6 are similarly performed (steps S7 to 11). The object to be cleaned 10 is ultrasonically cleaned with the cleaning liquid B, followed by overflow rinse and quick dump rinse.
Finally, the object 10 to be cleaned is carried out of the cleaning tank main body 2 (step S12), whereby the ultrasonic cleaning of the cleaning liquids A and B is completed.

As described above, according to the cleaning apparatus 1, the cleaning liquids A and B can be continuously ultrasonically cleaned using the single cleaning tank body 2, and space saving can be achieved. Furthermore, since the dirt diffused in the cleaning liquids A and B in each ultrasonic cleaning is first removed from the cleaning tank main body 2 and then overflow rinse and quick dump rinse are performed, the cleaning quality can be improved.
In addition, since the same cleaning tank body is cleaned using a different type of cleaning liquid, production and work efficiency can be improved.

[Cleaning method]
The present invention is also effective as an invention of a cleaning method. The cleaning method according to the present invention supplies a cleaning liquid to the cleaning tank main body 2, ultrasonically cleans the article 10 to be cleaned, and then supplies the cleaning liquid. A cleaning process to be discharged, an overflow rinsing process for supplying the rinsing liquid to the cleaning tank body 2 and overflowing the rinsing liquid, and discharging the rinsing liquid from the cleaning tank body 2 and spraying the rinsing liquid onto the object to be cleaned 10 And a quick dump rinsing step.
Thus, the present invention is also effective as a cleaning method, and in particular, by discharging the cleaning liquid containing dirt by ultrasonic cleaning, the cleaning tank body can be maintained in a clean state, and the cleaning quality can be improved. it can.

  Moreover, it is good also as a method of using the washing tank main body 2 and repeating a washing | cleaning process, an overflow rinse process, and / or a quick dump rinse process in multiple times. In this way, the cleaning tank body 2 is used, for example, ultrasonic cleaning with the cleaning liquid A, overflow rinsing and quick dump rinsing with pure water, ultrasonic cleaning with the cleaning liquid B, overflow rinsing and quick dump rinsing with pure water. It can be performed continuously, and high-quality cleaning can be performed in a space-saving state.

  Further, the cleaning method of the present invention may be a method of spraying the rinse liquid onto the object to be cleaned 10 and the inner wall of the cleaning tank body 2 when discharging the cleaning liquid. In this way, the cleaning liquid adhering to the object to be cleaned 10 and the cleaning liquid adhering to the inner wall of the cleaning tank main body 2 can be washed off and discharged to the drain line 52, so that the dirt contained in these cleaning liquids is removed. Therefore, the rinsing performance can be improved.

As described above, according to the cleaning method of the present invention, the cleaning and rinsing can be performed continuously using the same cleaning tank body 2, and the space for installing the cleaning device 1 can be saved. .
In addition, after the ultrasonic cleaning, all the dirty cleaning liquid is discharged from the drain port 21 provided at the lowermost part of the cleaning tank body 2, so that the dirt washed off from the object to be cleaned 10 does not remain at the bottom of the cleaning tank body 2. Therefore, the cleaning quality can be improved.

While the cleaning apparatus and the cleaning method of the present invention have been described with reference to the preferred embodiments, the cleaning apparatus and the cleaning method according to the present invention are not limited to the above-described embodiments, and the scope of the present invention. Needless to say, various modifications can be made.
For example, it can be used as a dip cleaning tank without operating the ultrasonic transducer 71.

  As described above, the cleaning apparatus and the cleaning method of the present invention are not limited to cleaning of electronic devices, and are suitable for cleaning optical instruments and medical instruments that require high cleanliness, for example. Can be used.

It is the schematic which shows the cross section and piping system of the washing | cleaning apparatus which concern on embodiment of this invention. It is a schematic flowchart figure for demonstrating operation | movement of the washing | cleaning apparatus which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Cleaning tank main body 3 Overflow tank 4 Liquid supply means 5 Liquid discharge means 6 Shower apparatus 7 Ultrasonic vibration apparatus 10 To-be-washed object 21 Drain outlet 22 Bottom plate 23 Water supply pipe 41 Pure water supply line 42 Cleaning liquid A supply line 43 Cleaning liquid B supply line 44 Filter 45 Connection pipe 51 Drain valve 52 Drain line 53 Pipe 61 Shower nozzle 62 Shower line 71 Ultrasonic vibrator 72 Outer tank 410, 420, 430 Solenoid valve

Claims (6)

A cleaning tank main body for storing an object to be cleaned;
Liquid supply means for selectively supplying a cleaning liquid or a rinsing liquid from the lower part of the cleaning tank body,
An ultrasonic vibration device for ultrasonically vibrating the cleaning liquid or the rinsing liquid stored in the cleaning tank body;
A liquid discharging means provided at a lower portion of the cleaning tank body, for discharging the cleaning liquid or the rinse liquid;
A shower device for injecting a cleaning liquid or a rinsing liquid onto the object to be cleaned;
An overflow tank provided at the top of the cleaning tank body;
A cleaning apparatus comprising:   The ultrasonic vibration device includes an outer tank that houses a bottom portion of the cleaning tank main body and is immersed in a vibration transmission liquid, and an ultrasonic vibrator provided on a lower surface of the outer tank. The cleaning device described.   The cleaning apparatus according to claim 1 or 2, wherein a drain outlet is provided in a lower side wall of the cleaning tank main body, and a bottom plate of the cleaning tank main body is inclined toward the drain outlet. A cleaning step of supplying a cleaning liquid to the cleaning tank body, ultrasonically cleaning the object to be cleaned, and then discharging the cleaning liquid;
Supplying an rinsing liquid to the main body of the washing tank, and an overflow rinsing step for overflowing the rinsing liquid;
A quick dump rinse step of discharging the rinse liquid from the cleaning tank body and spraying the rinse liquid onto the object to be cleaned,
A cleaning method characterized by comprising:   The cleaning method according to claim 4, wherein the cleaning step, the overflow rinsing step and / or the quick dump rinsing step are repeated a plurality of times using the cleaning tank body.   6. The cleaning method according to claim 4, wherein when the cleaning liquid is discharged, the rinse liquid is sprayed onto the object to be cleaned and the main body of the cleaning tank.

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