JPH0441173Y2 - - Google Patents
Info
- Publication number
- JPH0441173Y2 JPH0441173Y2 JP6168887U JP6168887U JPH0441173Y2 JP H0441173 Y2 JPH0441173 Y2 JP H0441173Y2 JP 6168887 U JP6168887 U JP 6168887U JP 6168887 U JP6168887 U JP 6168887U JP H0441173 Y2 JPH0441173 Y2 JP H0441173Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- wafer holder
- boat
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 119
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (pt) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (pt) | 1987-04-22 | 1987-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170464U JPS63170464U (pt) | 1988-11-07 |
| JPH0441173Y2 true JPH0441173Y2 (pt) | 1992-09-28 |
Family
ID=30895261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6168887U Expired JPH0441173Y2 (pt) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441173Y2 (pt) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0648859Y2 (ja) * | 1989-03-03 | 1994-12-12 | ラムコ株式会社 | ウエハー支持具 |
| US6585823B1 (en) * | 2000-07-07 | 2003-07-01 | Asm International, N.V. | Atomic layer deposition |
-
1987
- 1987-04-22 JP JP6168887U patent/JPH0441173Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63170464U (pt) | 1988-11-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100301213B1 (ko) | 웨이퍼 캐리어 회전용 턴 테이블 | |
| JPH05160241A (ja) | 基板処理装置 | |
| US5893795A (en) | Apparatus for moving a cassette | |
| JP2007318134A (ja) | 半導体移送装備（Ｓｅｍｉｃｏｎｄｕｃｔｏｒｍａｔｅｒｉａｌｈａｎｄｌｉｎｇｓｙｓｔｅｍ） | |
| JP2002520860A (ja) | ウェハーを極小接触でハンドリングするためのウェハーキャリア及び方法 | |
| JPH0441173Y2 (pt) | ||
| JP3470177B2 (ja) | 切削装置 | |
| EP0959495B1 (en) | Container and loader for substrate | |
| US20010048866A1 (en) | Container and loader for substrate | |
| JP2688623B2 (ja) | ダイシング装置 | |
| JP3531044B2 (ja) | 液晶表示装置用ガラス基板の移載方法および該方法に用いる装置 | |
| JPH02174244A (ja) | ウェハキャリア用治具枠およびウェハ移換装置 | |
| JPH06267808A (ja) | チャンバ接続用ガイド機構付きマルチチャンバ装置 | |
| JP3421358B2 (ja) | 搬送方法 | |
| JPH05183045A (ja) | カセット保管ケース | |
| JPH041150Y2 (pt) | ||
| JPH01313953A (ja) | ウェハー支持用のスパチュラ装置およびウェハーの配置方法 | |
| JP2000156391A (ja) | 半導体ウェーハ検査装置 | |
| CN221201136U (zh) | 晶圆翻转装置 | |
| JPS6322675Y2 (pt) | ||
| JPH06188309A (ja) | 精密切削装置 | |
| JPH0624182B2 (ja) | 基板交換装置 | |
| JP2000260857A (ja) | ウェハ搬送ロボットを用いたウェハ受渡し方法、及び、ウェハ処理装置 | |
| JPS61201695A (ja) | 気相成長装置 | |
| JPS5815654U (ja) | 真空蒸着装置 |