JPH044062U - - Google Patents
Info
- Publication number
- JPH044062U JPH044062U JP4259590U JP4259590U JPH044062U JP H044062 U JPH044062 U JP H044062U JP 4259590 U JP4259590 U JP 4259590U JP 4259590 U JP4259590 U JP 4259590U JP H044062 U JPH044062 U JP H044062U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- source
- wafer
- evaporation
- load lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000002184 metal Substances 0.000 description 2
- 235000015067 sauces Nutrition 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259590U JPH044062U (enExample) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259590U JPH044062U (enExample) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044062U true JPH044062U (enExample) | 1992-01-14 |
Family
ID=31554275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4259590U Pending JPH044062U (enExample) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044062U (enExample) |
-
1990
- 1990-04-20 JP JP4259590U patent/JPH044062U/ja active Pending
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