JPH0440160Y2 - - Google Patents
Info
- Publication number
- JPH0440160Y2 JPH0440160Y2 JP3814486U JP3814486U JPH0440160Y2 JP H0440160 Y2 JPH0440160 Y2 JP H0440160Y2 JP 3814486 U JP3814486 U JP 3814486U JP 3814486 U JP3814486 U JP 3814486U JP H0440160 Y2 JPH0440160 Y2 JP H0440160Y2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- pressure
- furnace
- heating chamber
- furnace core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 19
- 230000001681 protective effect Effects 0.000 claims description 14
- 239000012495 reaction gas Substances 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3814486U JPH0440160Y2 (sl) | 1986-03-14 | 1986-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3814486U JPH0440160Y2 (sl) | 1986-03-14 | 1986-03-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62149798U JPS62149798U (sl) | 1987-09-22 |
| JPH0440160Y2 true JPH0440160Y2 (sl) | 1992-09-21 |
Family
ID=30850111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3814486U Expired JPH0440160Y2 (sl) | 1986-03-14 | 1986-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440160Y2 (sl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6111225A (en) * | 1996-02-23 | 2000-08-29 | Tokyo Electron Limited | Wafer processing apparatus with a processing vessel, upper and lower separately sealed heating vessels, and means for maintaining the vessels at predetermined pressures |
| JP5202810B2 (ja) | 2006-02-06 | 2013-06-05 | 古河電気工業株式会社 | グラファイト加熱炉および光ファイバの製造方法 |
-
1986
- 1986-03-14 JP JP3814486U patent/JPH0440160Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62149798U (sl) | 1987-09-22 |
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