JPH0438325B2 - - Google Patents

Info

Publication number
JPH0438325B2
JPH0438325B2 JP59202019A JP20201984A JPH0438325B2 JP H0438325 B2 JPH0438325 B2 JP H0438325B2 JP 59202019 A JP59202019 A JP 59202019A JP 20201984 A JP20201984 A JP 20201984A JP H0438325 B2 JPH0438325 B2 JP H0438325B2
Authority
JP
Japan
Prior art keywords
sample
light
image sensor
scanning
linear image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59202019A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6180215A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59202019A priority Critical patent/JPS6180215A/ja
Priority to US06/777,342 priority patent/US4736110A/en
Priority to DE8585306813T priority patent/DE3586383T2/de
Priority to EP85306813A priority patent/EP0176358B1/en
Priority to KR1019850007160A priority patent/KR910000617B1/ko
Priority to CA000491791A priority patent/CA1266324A/en
Publication of JPS6180215A publication Critical patent/JPS6180215A/ja
Publication of JPH0438325B2 publication Critical patent/JPH0438325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP59202019A 1984-09-28 1984-09-28 走査型顕微鏡撮像装置 Granted JPS6180215A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP59202019A JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置
US06/777,342 US4736110A (en) 1984-09-28 1985-09-18 Image pick-up apparatus
DE8585306813T DE3586383T2 (de) 1984-09-28 1985-09-25 Bildaufnahmegeraet.
EP85306813A EP0176358B1 (en) 1984-09-28 1985-09-25 Image pick-up apparatus
KR1019850007160A KR910000617B1 (ko) 1984-09-28 1985-09-27 영상 픽업 장치
CA000491791A CA1266324A (en) 1984-09-28 1985-09-27 Image pick-up apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59202019A JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置

Publications (2)

Publication Number Publication Date
JPS6180215A JPS6180215A (ja) 1986-04-23
JPH0438325B2 true JPH0438325B2 (en:Method) 1992-06-24

Family

ID=16450572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59202019A Granted JPS6180215A (ja) 1984-09-28 1984-09-28 走査型顕微鏡撮像装置

Country Status (1)

Country Link
JP (1) JPS6180215A (en:Method)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074005B2 (ja) * 1986-04-09 1995-01-18 レーザーテック株式会社 撮像装置
JP2845919B2 (ja) * 1989-02-07 1999-01-13 住友大阪セメント株式会社 コヒーレント光走査型光学顕微鏡装置
JP2724502B2 (ja) * 1989-06-19 1998-03-09 東京エレクトロン株式会社 走査型顕微鏡装置
JP3736213B2 (ja) * 1999-07-15 2006-01-18 横河電機株式会社 共焦点光スキャナ
JP2005024596A (ja) * 2003-06-30 2005-01-27 Susumu Terakawa 共焦点走査顕微鏡
JP5164713B2 (ja) * 2008-07-24 2013-03-21 キヤノン株式会社 検出装置及び方法
NL2008110A (en) 2011-02-18 2012-08-21 Asml Netherlands Bv Measuring method, measuring apparatus, lithographic apparatus and device manufacturing method.
CN106999037B (zh) 2014-09-12 2019-10-11 无忧易中心股份公司 眼睛检查装置

Also Published As

Publication number Publication date
JPS6180215A (ja) 1986-04-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees