JPH0438250Y2 - - Google Patents
Info
- Publication number
- JPH0438250Y2 JPH0438250Y2 JP1986177131U JP17713186U JPH0438250Y2 JP H0438250 Y2 JPH0438250 Y2 JP H0438250Y2 JP 1986177131 U JP1986177131 U JP 1986177131U JP 17713186 U JP17713186 U JP 17713186U JP H0438250 Y2 JPH0438250 Y2 JP H0438250Y2
- Authority
- JP
- Japan
- Prior art keywords
- target
- sheet
- front part
- foreign object
- sheet material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 56
- 238000001514 detection method Methods 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007664 blowing Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986177131U JPH0438250Y2 (sv) | 1986-11-18 | 1986-11-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986177131U JPH0438250Y2 (sv) | 1986-11-18 | 1986-11-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6381203U JPS6381203U (sv) | 1988-05-28 |
JPH0438250Y2 true JPH0438250Y2 (sv) | 1992-09-08 |
Family
ID=31118045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986177131U Expired JPH0438250Y2 (sv) | 1986-11-18 | 1986-11-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0438250Y2 (sv) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53134467A (en) * | 1977-03-03 | 1978-11-24 | Measurex Corp | Contact type thickness meter |
-
1986
- 1986-11-18 JP JP1986177131U patent/JPH0438250Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53134467A (en) * | 1977-03-03 | 1978-11-24 | Measurex Corp | Contact type thickness meter |
Also Published As
Publication number | Publication date |
---|---|
JPS6381203U (sv) | 1988-05-28 |
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