JPH0437969B2 - - Google Patents
Info
- Publication number
- JPH0437969B2 JPH0437969B2 JP11825182A JP11825182A JPH0437969B2 JP H0437969 B2 JPH0437969 B2 JP H0437969B2 JP 11825182 A JP11825182 A JP 11825182A JP 11825182 A JP11825182 A JP 11825182A JP H0437969 B2 JPH0437969 B2 JP H0437969B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- metal layer
- mim
- manufacturing
- insulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 9
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1365—Active matrix addressed cells in which the switching element is a two-electrode device
Landscapes
- Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57118251A JPS599631A (ja) | 1982-07-07 | 1982-07-07 | 電気光学装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57118251A JPS599631A (ja) | 1982-07-07 | 1982-07-07 | 電気光学装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS599631A JPS599631A (ja) | 1984-01-19 |
JPH0437969B2 true JPH0437969B2 (enrdf_load_stackoverflow) | 1992-06-23 |
Family
ID=14731978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57118251A Granted JPS599631A (ja) | 1982-07-07 | 1982-07-07 | 電気光学装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS599631A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61134070A (ja) * | 1984-12-05 | 1986-06-21 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタアレイ |
-
1982
- 1982-07-07 JP JP57118251A patent/JPS599631A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS599631A (ja) | 1984-01-19 |
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