JPH0437909Y2 - - Google Patents

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Publication number
JPH0437909Y2
JPH0437909Y2 JP16214887U JP16214887U JPH0437909Y2 JP H0437909 Y2 JPH0437909 Y2 JP H0437909Y2 JP 16214887 U JP16214887 U JP 16214887U JP 16214887 U JP16214887 U JP 16214887U JP H0437909 Y2 JPH0437909 Y2 JP H0437909Y2
Authority
JP
Japan
Prior art keywords
electron beam
liquid nitrogen
molecular beam
crystal growth
nitrogen shroud
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16214887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0165870U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16214887U priority Critical patent/JPH0437909Y2/ja
Publication of JPH0165870U publication Critical patent/JPH0165870U/ja
Application granted granted Critical
Publication of JPH0437909Y2 publication Critical patent/JPH0437909Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16214887U 1987-10-22 1987-10-22 Expired JPH0437909Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16214887U JPH0437909Y2 (https=) 1987-10-22 1987-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16214887U JPH0437909Y2 (https=) 1987-10-22 1987-10-22

Publications (2)

Publication Number Publication Date
JPH0165870U JPH0165870U (https=) 1989-04-27
JPH0437909Y2 true JPH0437909Y2 (https=) 1992-09-04

Family

ID=31445710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16214887U Expired JPH0437909Y2 (https=) 1987-10-22 1987-10-22

Country Status (1)

Country Link
JP (1) JPH0437909Y2 (https=)

Also Published As

Publication number Publication date
JPH0165870U (https=) 1989-04-27

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