JPH0437038B2 - - Google Patents
Info
- Publication number
- JPH0437038B2 JPH0437038B2 JP24389086A JP24389086A JPH0437038B2 JP H0437038 B2 JPH0437038 B2 JP H0437038B2 JP 24389086 A JP24389086 A JP 24389086A JP 24389086 A JP24389086 A JP 24389086A JP H0437038 B2 JPH0437038 B2 JP H0437038B2
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- single crystal
- ring
- measurement
- peaks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 18
- 230000004927 fusion Effects 0.000 claims description 15
- 238000000691 measurement method Methods 0.000 claims description 5
- 239000008710 crystal-8 Substances 0.000 description 19
- 238000005259 measurement Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012467 final product Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000004033 diameter control Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000003909 pattern recognition Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24389086A JPS63100097A (ja) | 1986-10-14 | 1986-10-14 | 単結晶の直径測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24389086A JPS63100097A (ja) | 1986-10-14 | 1986-10-14 | 単結晶の直径測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63100097A JPS63100097A (ja) | 1988-05-02 |
| JPH0437038B2 true JPH0437038B2 (enrdf_load_html_response) | 1992-06-18 |
Family
ID=17110513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24389086A Granted JPS63100097A (ja) | 1986-10-14 | 1986-10-14 | 単結晶の直径測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100097A (enrdf_load_html_response) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2601930B2 (ja) * | 1990-03-29 | 1997-04-23 | 信越半導体株式会社 | 単結晶ネツク部直径制御方法及び装置 |
| JP4089500B2 (ja) * | 2003-05-06 | 2008-05-28 | 株式会社Ｓｕｍｃｏ | 単結晶引き上げ装置内の融液の液面位置測定方法 |
| JP5924090B2 (ja) * | 2012-04-12 | 2016-05-25 | 株式会社Sumco | 単結晶引き上げ方法 |
| DE102013210687B4 (de) * | 2013-06-07 | 2018-12-06 | Siltronic Ag | Verfahren zur Regelung des Durchmessers eines Einkristalls auf einen Solldurchmesser |
-
1986
- 1986-10-14 JP JP24389086A patent/JPS63100097A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63100097A (ja) | 1988-05-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |