JPH0436109Y2 - - Google Patents
Info
- Publication number
- JPH0436109Y2 JPH0436109Y2 JP15596886U JP15596886U JPH0436109Y2 JP H0436109 Y2 JPH0436109 Y2 JP H0436109Y2 JP 15596886 U JP15596886 U JP 15596886U JP 15596886 U JP15596886 U JP 15596886U JP H0436109 Y2 JPH0436109 Y2 JP H0436109Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- pattern
- mask
- end point
- masks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 68
- 238000000034 method Methods 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15596886U JPH0436109Y2 (enExample) | 1986-10-09 | 1986-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15596886U JPH0436109Y2 (enExample) | 1986-10-09 | 1986-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361124U JPS6361124U (enExample) | 1988-04-22 |
| JPH0436109Y2 true JPH0436109Y2 (enExample) | 1992-08-26 |
Family
ID=31077146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15596886U Expired JPH0436109Y2 (enExample) | 1986-10-09 | 1986-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436109Y2 (enExample) |
-
1986
- 1986-10-09 JP JP15596886U patent/JPH0436109Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6361124U (enExample) | 1988-04-22 |
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