JPH0435682B2 - - Google Patents
Info
- Publication number
- JPH0435682B2 JPH0435682B2 JP22752686A JP22752686A JPH0435682B2 JP H0435682 B2 JPH0435682 B2 JP H0435682B2 JP 22752686 A JP22752686 A JP 22752686A JP 22752686 A JP22752686 A JP 22752686A JP H0435682 B2 JPH0435682 B2 JP H0435682B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- film
- light
- rotation
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 9
- 238000005305 interferometry Methods 0.000 claims description 5
- 230000002452 interceptive effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 69
- 239000010409 thin film Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 8
- 239000011651 chromium Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 4
- 238000007405 data analysis Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- UIZLQMLDSWKZGC-UHFFFAOYSA-N cadmium helium Chemical compound [He].[Cd] UIZLQMLDSWKZGC-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22752686A JPS6382306A (ja) | 1986-09-26 | 1986-09-26 | 試料回転型干渉法膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22752686A JPS6382306A (ja) | 1986-09-26 | 1986-09-26 | 試料回転型干渉法膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6382306A JPS6382306A (ja) | 1988-04-13 |
| JPH0435682B2 true JPH0435682B2 (OSRAM) | 1992-06-11 |
Family
ID=16862284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22752686A Granted JPS6382306A (ja) | 1986-09-26 | 1986-09-26 | 試料回転型干渉法膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382306A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2606764B2 (ja) * | 1991-08-30 | 1997-05-07 | 東海ゴム工業株式会社 | コネクタに使用する雄部材の製造方法 |
| US5729343A (en) * | 1995-11-16 | 1998-03-17 | Nikon Precision Inc. | Film thickness measurement apparatus with tilting stage and method of operation |
-
1986
- 1986-09-26 JP JP22752686A patent/JPS6382306A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6382306A (ja) | 1988-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |