JPH0435141U - - Google Patents

Info

Publication number
JPH0435141U
JPH0435141U JP7704590U JP7704590U JPH0435141U JP H0435141 U JPH0435141 U JP H0435141U JP 7704590 U JP7704590 U JP 7704590U JP 7704590 U JP7704590 U JP 7704590U JP H0435141 U JPH0435141 U JP H0435141U
Authority
JP
Japan
Prior art keywords
reticle
model
written
symbol
identifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7704590U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7704590U priority Critical patent/JPH0435141U/ja
Publication of JPH0435141U publication Critical patent/JPH0435141U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例によるレチクルの外形
図を示す、第２図は、従来のマスク レチクルの
バーコードの位置を示す図である。 １……レチクル、２……バーコード記入部、３
……パターン部、４……レチクルアライメントマ
ーク部。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体装置などの製造工程で使用するマスクレ
    チクルにおいて端面にマスク レチクルの機種認
    識等のための記号、バーコード等を記入したこと
    を特徴とするレチクル。
JP7704590U 1990-07-20 1990-07-20 Pending JPH0435141U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7704590U JPH0435141U (ja) 1990-07-20 1990-07-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7704590U JPH0435141U (ja) 1990-07-20 1990-07-20

Publications (1)

Publication Number Publication Date
JPH0435141U true JPH0435141U (ja) 1992-03-24

Family

ID=31619062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7704590U Pending JPH0435141U (ja) 1990-07-20 1990-07-20

Country Status (1)

Country Link
JP (1) JPH0435141U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01251298A (ja) * 1988-03-31 1989-10-06 Nohmi Bosai Ltd 火災検知装置
WO2000028380A1 (fr) * 1998-11-06 2000-05-18 Nikon Corporation Procede et dispositif d'exposition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01251298A (ja) * 1988-03-31 1989-10-06 Nohmi Bosai Ltd 火災検知装置
WO2000028380A1 (fr) * 1998-11-06 2000-05-18 Nikon Corporation Procede et dispositif d'exposition

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