JPH0432633Y2 - - Google Patents
Info
- Publication number
- JPH0432633Y2 JPH0432633Y2 JP11443686U JP11443686U JPH0432633Y2 JP H0432633 Y2 JPH0432633 Y2 JP H0432633Y2 JP 11443686 U JP11443686 U JP 11443686U JP 11443686 U JP11443686 U JP 11443686U JP H0432633 Y2 JPH0432633 Y2 JP H0432633Y2
- Authority
- JP
- Japan
- Prior art keywords
- rail
- axis direction
- axis
- guide rail
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000033001 locomotion Effects 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 17
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11443686U JPH0432633Y2 (US06272168-20010807-M00014.png) | 1986-07-25 | 1986-07-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11443686U JPH0432633Y2 (US06272168-20010807-M00014.png) | 1986-07-25 | 1986-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6321897U JPS6321897U (US06272168-20010807-M00014.png) | 1988-02-13 |
JPH0432633Y2 true JPH0432633Y2 (US06272168-20010807-M00014.png) | 1992-08-05 |
Family
ID=30997175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11443686U Expired JPH0432633Y2 (US06272168-20010807-M00014.png) | 1986-07-25 | 1986-07-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0432633Y2 (US06272168-20010807-M00014.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02181339A (ja) * | 1988-12-28 | 1990-07-16 | Koito Mfg Co Ltd | 放電ランプの支持構造 |
-
1986
- 1986-07-25 JP JP11443686U patent/JPH0432633Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6321897U (US06272168-20010807-M00014.png) | 1988-02-13 |
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