JPH04317208A - Surface acoustic wave element - Google Patents
Surface acoustic wave elementInfo
- Publication number
- JPH04317208A JPH04317208A JP8524391A JP8524391A JPH04317208A JP H04317208 A JPH04317208 A JP H04317208A JP 8524391 A JP8524391 A JP 8524391A JP 8524391 A JP8524391 A JP 8524391A JP H04317208 A JPH04317208 A JP H04317208A
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- small pieces
- circuit board
- wave element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 claims description 30
- 239000011358 absorbing material Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 3
- 239000012814 acoustic material Substances 0.000 abstract 1
- 239000012790 adhesive layer Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は電気回路に用いられる弾
性表面波素子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave element used in an electric circuit.
【0002】0002
【従来の技術】従来の技術では、吸音材を用いることな
く、単に圧電基板の小片の裏側同士を接着するにすぎな
かった。2. Description of the Related Art In the prior art, the back sides of small pieces of piezoelectric substrates were simply adhered to each other without using any sound absorbing material.
【0003】0003
【発明が解決しようとする課題】上記従来技術では、一
方の弾性表面波素子の小片から発生したモード変換によ
る不要なバルク波が、もう一方の基板の小片との接合部
で反射し、特性に悪影響を与えるという課題を有してい
た。[Problem to be Solved by the Invention] In the above-mentioned conventional technology, unnecessary bulk waves due to mode conversion generated from a small piece of one surface acoustic wave element are reflected at the joint with a small piece of the other substrate, resulting in a change in characteristics. The problem was that it had a negative impact.
【0004】更に2枚の基板の小片の接合部で反射せず
、透過した不要なバルク波は、もう一方の弾性表面波素
子の特性にも悪影響を及ぼすという課題を有していた。[0004] Furthermore, there is a problem in that unnecessary bulk waves that are transmitted without being reflected at the joint between the small pieces of the two substrates also have an adverse effect on the characteristics of the other surface acoustic wave element.
【0005】本発明の目的は弾性表面波素子が形成され
た圧電基板の小片を2枚、上記素子が形成されている面
と対向する面を互いに向かい合うように張り合わせると
き、一方の弾性表面波素子から発生したバルク波による
影響を防止する技術を提供するものである。An object of the present invention is to bond two small pieces of piezoelectric substrates each having a surface acoustic wave element formed thereon so that the surfaces opposite to the surface on which the element is formed face each other. The present invention provides a technology for preventing the influence of bulk waves generated from elements.
【0006】[0006]
【課題を解決するための手段】上記目的は、弾性表面波
素子が形成された圧電基板の小片を2枚、上記素子が形
成されている面と対向する面を互いに向かい合うように
張り合わせるとき、前記圧電基板の小片間に吸音材を挟
み込み接着することにより達成される。[Means for Solving the Problems] The above object is achieved by bonding two small pieces of piezoelectric substrates each having a surface acoustic wave element formed thereon so that the surfaces opposite to the surface on which the element is formed face each other. This is achieved by sandwiching and adhering a sound absorbing material between the small pieces of the piezoelectric substrate.
【0007】[0007]
【作用】一方の弾性表面波素子より発生したバルク波な
どの不要な波は、圧電基板の小片の接合部で塗布されて
いる吸音材によって吸収され、特性に影響を及ぼすこと
はなくなる。[Operation] Unnecessary waves such as bulk waves generated by one of the surface acoustic wave elements are absorbed by the sound absorbing material coated at the joints of the small pieces of the piezoelectric substrate, and do not affect the characteristics.
【0008】[0008]
【実施例】図1は、弾性表面波素子が形成された圧電基
板の小片2を2枚、上記素子が形成されていない面に吸
音材を塗布し、互いに張り合わせたものをステム3とシ
ェル4とからなる円柱形のパッケージに納めた場合の一
実施例である。[Example] Fig. 1 shows a stem 3 and a shell 4 in which two small pieces 2 of piezoelectric substrates on which surface acoustic wave elements are formed are pasted together with a sound absorbing material applied to the surface where the elements are not formed. This is an example of a case where the device is housed in a cylindrical package consisting of.
【0009】図1は側面からみた場合であり、シェルを
透過して内部が見えるように書かれている。FIG. 1 is a side view, and is drawn so that the interior can be seen through the shell.
【0010】圧電体基板としては例えば、水晶やタンタ
ル酸リチウムが用いられる。この基板上にいくつかの弾
性表面波素子のパターンがアルミニウム等の導電性金属
で形成された後、ダイシングマシンなどで圧電体基板の
小片3に切断される。そして圧電体基板の小片3の裏面
、すなわちパターンが形成されていない面に吸音材と接
着剤1を塗布する。[0010] For example, quartz crystal or lithium tantalate is used as the piezoelectric substrate. After several patterns of surface acoustic wave elements are formed on this substrate using a conductive metal such as aluminum, the piezoelectric substrate is cut into small pieces 3 using a dicing machine or the like. Then, the sound absorbing material and adhesive 1 are applied to the back surface of the small piece 3 of the piezoelectric substrate, that is, the surface on which no pattern is formed.
【0011】接着終了後、リード線と圧電基板の小片を
導電性ペーストや半田付け等の方法により固定する。こ
こでリード線はステム3を貫通して、これに固定されて
いる缶型ケースを用いている。[0011] After the adhesion is completed, the lead wire and the small piece of the piezoelectric substrate are fixed by a method such as conductive paste or soldering. Here, a can-shaped case is used in which the lead wire passes through the stem 3 and is fixed thereto.
【0012】上記の例では張り合わせる2枚の基板の小
片は共に弾性表面波素子を形成した圧電基板であったが
、2枚の内、一方はその必要はなく、半導体回路が形成
されたシリコン基板やガリウム砒素基板であっても良い
。In the above example, the small pieces of the two substrates to be pasted together were both piezoelectric substrates on which surface acoustic wave elements were formed, but one of the two substrates was not necessary and was made of silicon on which a semiconductor circuit was formed. It may be a substrate or a gallium arsenide substrate.
【0013】図2は図1をA方向から見た図である。圧
電基板の小片を2枚、吸音材を挟み込み接着し、これを
リード線に固定している。なお、この図では圧電基板の
小片2と吸音材と接着剤の層1はステムを透過してみて
いるため波線で描かれている。FIG. 2 is a diagram of FIG. 1 viewed from direction A. Two small pieces of piezoelectric substrates are glued together with sound-absorbing material sandwiched between them, and these are fixed to the lead wires. In addition, in this figure, the small piece 2 of the piezoelectric substrate, the sound absorbing material, and the adhesive layer 1 are drawn with wavy lines because they are seen through the stem.
【0014】またリード線5は上側の素子用と下側の素
子用のリード線があるため計4本が必要であるが、これ
は1枚の圧電体基板の小片上に形成される弾性表面波素
子の数に応じた、必要数を設ければ良い。図3は当発明
の接着剤と吸音材の塗布を示した例である。一般に接着
剤と吸音材とを混ぜて使用しても良いが、混ぜて使用す
ると変質等の影響で経時特性が劣化するような場合、図
3の例が用いられる。はじめに圧電体基板の小片2の裏
側、すなわち弾性表面波素子の形成されていない面の外
周付近に接着剤を塗布し、更にその内側に吸音材を塗布
する。そして圧電体基板の小片の裏側同士を接着する。Furthermore, since there are lead wires 5 for the upper element and for the lower element, a total of four lead wires are required. The required number may be provided depending on the number of wave elements. FIG. 3 is an example showing the application of the adhesive and sound absorbing material of the present invention. Generally, an adhesive and a sound absorbing material may be used in combination, but if the mixture is used, the aging characteristics will deteriorate due to deterioration or the like, then the example shown in FIG. 3 is used. First, an adhesive is applied to the back side of the small piece 2 of the piezoelectric substrate, that is, near the outer periphery of the surface on which the surface acoustic wave element is not formed, and then a sound absorbing material is applied to the inside thereof. Then, the back sides of the small pieces of the piezoelectric substrate are glued together.
【0015】図4は接着剤の層と吸音材の層を交互に塗
布した例である。このような場合でもある程度バルク波
などの不要な波を打ち消すことができる。この実施例は
弾性表面波素子を振動の激しいところで使用するような
時接着強度を保つ目的で使用される。FIG. 4 shows an example in which adhesive layers and sound absorbing material layers are applied alternately. Even in this case, unnecessary waves such as bulk waves can be canceled to some extent. This embodiment is used for the purpose of maintaining adhesive strength when the surface acoustic wave element is used in a place where vibrations are severe.
【0016】図5は当発明実施前後の弾性表面波フィル
ターの周波数特性を示したものである。FIG. 5 shows the frequency characteristics of the surface acoustic wave filter before and after implementing the present invention.
【0017】点線で示した当発明実施前8では通過帯域
が若干波打つ現象がみられたが、実線で示した当発明実
施後9では通過帯域に波打つ現象がみられなくなった。A phenomenon in which the passband was slightly wavy was observed in the case 8 before the present invention was implemented, which is indicated by a dotted line, but the wavy phenomenon in the passband was no longer observed in the case 9 after the present invention was implemented, which was indicated by a solid line.
【0018】以上は弾性表面波フィルターについて述べ
たが、これらは弾性表面波を応用した素子、例えば共振
子や、遅延素子などについても特性は向上する。Although surface acoustic wave filters have been described above, the characteristics of these filters can also be improved for elements to which surface acoustic waves are applied, such as resonators and delay elements.
【0019】[0019]
【発明の効果】本発明によれば、弾性表面波素子が形成
された圧電基板の小片を2枚、上記素子が形成されてい
る面と対向する面を互いに向かい合うように張り合わせ
るとき、前記圧電基板の小片間に吸音材を挟み込み接着
することにより、バルク波などの影響を防止することが
でき、吸音材がない場合よりも特性が向上するという効
果を有する。According to the present invention, when two small pieces of piezoelectric substrates each having a surface acoustic wave element formed thereon are pasted together so that the surfaces opposite to the surfaces on which the surface acoustic wave elements are formed face each other, the piezoelectric By sandwiching and adhering the sound absorbing material between the small pieces of the substrate, it is possible to prevent the influence of bulk waves, etc., and has the effect of improving the characteristics compared to the case without the sound absorbing material.
【図1】本発明の一実施例の側面図。FIG. 1 is a side view of one embodiment of the present invention.
【図2】本発明の一実施例を下側からみた正面図。FIG. 2 is a front view of an embodiment of the present invention seen from below.
【図3】本発明の圧電基板の小片の接着方法の一実施例
を示した正面図。FIG. 3 is a front view showing an embodiment of the method for adhering small pieces of a piezoelectric substrate according to the present invention.
【図4】本発明の第2の実施例を示した側面図。FIG. 4 is a side view showing a second embodiment of the invention.
【図5】本発明実施前後の周波数特性を示す図。FIG. 5 is a diagram showing frequency characteristics before and after implementation of the present invention.
1 吸音材と接着剤の層 2 圧電体基板の小片 3 ステム 4 シェル 5 リード線 6 接着剤 7 吸音材 8 当発明実施前の特性 9 当発明実施後の特性 1. Sound absorbing material and adhesive layer 2 Small piece of piezoelectric substrate 3 Stem 4 Shell 5 Lead wire 6. Adhesive 7 Sound absorbing material 8 Characteristics before implementation of the invention 9 Characteristics after implementation of the present invention
Claims (3)
の小片2枚を、上記素子が形成されている面の反対側の
面同士を張り合わせた構造において、前記圧電基板の小
片間に吸音材を挟み込んで接合したことを特徴とする弾
性表面波素子。1. In a structure in which two small pieces of a piezoelectric substrate on which a surface acoustic wave element is formed are pasted together with their surfaces opposite to the surface on which the element is formed, a sound absorbing material is placed between the small pieces of the piezoelectric substrate. A surface acoustic wave element characterized by sandwiching and bonding.
が形成された圧電基板の小片であることを特徴とする、
請求項1に記載の弾性表面波素子。2. One of the small pieces of the substrate is a small piece of a piezoelectric substrate on which a surface acoustic wave element is formed,
The surface acoustic wave device according to claim 1.
る、請求項1に記載の弾性表面波素子。3. The surface acoustic wave element according to claim 1, wherein the sound absorbing material is an adhesive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8524391A JPH04317208A (en) | 1991-04-17 | 1991-04-17 | Surface acoustic wave element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8524391A JPH04317208A (en) | 1991-04-17 | 1991-04-17 | Surface acoustic wave element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04317208A true JPH04317208A (en) | 1992-11-09 |
Family
ID=13853127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8524391A Pending JPH04317208A (en) | 1991-04-17 | 1991-04-17 | Surface acoustic wave element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04317208A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011185681A (en) * | 2010-03-05 | 2011-09-22 | National Institute Of Advanced Industrial Science & Technology | Piezoelectric sensor |
-
1991
- 1991-04-17 JP JP8524391A patent/JPH04317208A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011185681A (en) * | 2010-03-05 | 2011-09-22 | National Institute Of Advanced Industrial Science & Technology | Piezoelectric sensor |
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