JPH0430192B2 - - Google Patents
Info
- Publication number
- JPH0430192B2 JPH0430192B2 JP58052730A JP5273083A JPH0430192B2 JP H0430192 B2 JPH0430192 B2 JP H0430192B2 JP 58052730 A JP58052730 A JP 58052730A JP 5273083 A JP5273083 A JP 5273083A JP H0430192 B2 JPH0430192 B2 JP H0430192B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- storage diode
- electrode
- layer
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000003384 imaging method Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 5
- 206010047571 Visual impairment Diseases 0.000 description 11
- 239000000969 carrier Substances 0.000 description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58052730A JPS59178769A (ja) | 1983-03-30 | 1983-03-30 | 固体撮像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58052730A JPS59178769A (ja) | 1983-03-30 | 1983-03-30 | 固体撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59178769A JPS59178769A (ja) | 1984-10-11 |
| JPH0430192B2 true JPH0430192B2 (de) | 1992-05-21 |
Family
ID=12923039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58052730A Granted JPS59178769A (ja) | 1983-03-30 | 1983-03-30 | 固体撮像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178769A (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4572130B2 (ja) * | 2005-03-09 | 2010-10-27 | 富士フイルム株式会社 | 固体撮像素子 |
| DE102008046035A1 (de) * | 2007-09-07 | 2009-04-16 | Dongbu Hitek Co., Ltd. | Bildsensor und Verfahren zu seiner Herstellung |
| US7999292B2 (en) * | 2007-09-07 | 2011-08-16 | Dongbu Hitek Co., Ltd. | Image sensor and manufacturing method thereof |
| KR100997299B1 (ko) * | 2007-09-07 | 2010-11-29 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
| KR101002121B1 (ko) * | 2007-12-27 | 2010-12-16 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
| KR100882990B1 (ko) * | 2007-12-27 | 2009-02-12 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
| KR100922924B1 (ko) | 2007-12-28 | 2009-10-22 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
| JP5501262B2 (ja) * | 2011-02-04 | 2014-05-21 | 富士フイルム株式会社 | 固体撮像素子の製造方法、固体撮像素子、撮像装置 |
-
1983
- 1983-03-30 JP JP58052730A patent/JPS59178769A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59178769A (ja) | 1984-10-11 |
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