JPH0429898Y2 - - Google Patents
Info
- Publication number
- JPH0429898Y2 JPH0429898Y2 JP9765588U JP9765588U JPH0429898Y2 JP H0429898 Y2 JPH0429898 Y2 JP H0429898Y2 JP 9765588 U JP9765588 U JP 9765588U JP 9765588 U JP9765588 U JP 9765588U JP H0429898 Y2 JPH0429898 Y2 JP H0429898Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- gutter
- door
- outlet
- cleaning chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 48
- 239000007788 liquid Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9765588U JPH0429898Y2 (zh) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9765588U JPH0429898Y2 (zh) | 1988-07-22 | 1988-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02133485U JPH02133485U (zh) | 1990-11-06 |
| JPH0429898Y2 true JPH0429898Y2 (zh) | 1992-07-20 |
Family
ID=31646790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9765588U Expired JPH0429898Y2 (zh) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429898Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2565625Y2 (ja) * | 1992-09-07 | 1998-03-18 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
1988
- 1988-07-22 JP JP9765588U patent/JPH0429898Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02133485U (zh) | 1990-11-06 |
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