JPH0429898Y2 - - Google Patents

Info

Publication number
JPH0429898Y2
JPH0429898Y2 JP9765588U JP9765588U JPH0429898Y2 JP H0429898 Y2 JPH0429898 Y2 JP H0429898Y2 JP 9765588 U JP9765588 U JP 9765588U JP 9765588 U JP9765588 U JP 9765588U JP H0429898 Y2 JPH0429898 Y2 JP H0429898Y2
Authority
JP
Japan
Prior art keywords
cleaning
gutter
door
outlet
cleaning chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9765588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02133485U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9765588U priority Critical patent/JPH0429898Y2/ja
Publication of JPH02133485U publication Critical patent/JPH02133485U/ja
Application granted granted Critical
Publication of JPH0429898Y2 publication Critical patent/JPH0429898Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP9765588U 1988-07-22 1988-07-22 Expired JPH0429898Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9765588U JPH0429898Y2 (de) 1988-07-22 1988-07-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9765588U JPH0429898Y2 (de) 1988-07-22 1988-07-22

Publications (2)

Publication Number Publication Date
JPH02133485U JPH02133485U (de) 1990-11-06
JPH0429898Y2 true JPH0429898Y2 (de) 1992-07-20

Family

ID=31646790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9765588U Expired JPH0429898Y2 (de) 1988-07-22 1988-07-22

Country Status (1)

Country Link
JP (1) JPH0429898Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2565625Y2 (ja) * 1992-09-07 1998-03-18 大日本スクリーン製造株式会社 基板処理装置

Also Published As

Publication number Publication date
JPH02133485U (de) 1990-11-06

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