JPH0429439Y2 - - Google Patents

Info

Publication number
JPH0429439Y2
JPH0429439Y2 JP1982191351U JP19135182U JPH0429439Y2 JP H0429439 Y2 JPH0429439 Y2 JP H0429439Y2 JP 1982191351 U JP1982191351 U JP 1982191351U JP 19135182 U JP19135182 U JP 19135182U JP H0429439 Y2 JPH0429439 Y2 JP H0429439Y2
Authority
JP
Japan
Prior art keywords
ion beam
sample
beam irradiation
electron
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982191351U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5997458U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19135182U priority Critical patent/JPS5997458U/ja
Publication of JPS5997458U publication Critical patent/JPS5997458U/ja
Application granted granted Critical
Publication of JPH0429439Y2 publication Critical patent/JPH0429439Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP19135182U 1982-12-20 1982-12-20 イオン電子線照射装置 Granted JPS5997458U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19135182U JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19135182U JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Publications (2)

Publication Number Publication Date
JPS5997458U JPS5997458U (ja) 1984-07-02
JPH0429439Y2 true JPH0429439Y2 (pm) 1992-07-16

Family

ID=30412081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19135182U Granted JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Country Status (1)

Country Link
JP (1) JPS5997458U (pm)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515315A (en) * 1974-07-04 1976-01-17 Hiroshi Arima Rensetsutairuno seizohoho
JPS5947424B2 (ja) * 1976-02-27 1984-11-19 株式会社島津製作所 複合分析装置
JPS54117059U (pm) * 1978-02-03 1979-08-16

Also Published As

Publication number Publication date
JPS5997458U (ja) 1984-07-02

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