JPH0426530U - - Google Patents
Info
- Publication number
- JPH0426530U JPH0426530U JP6728090U JP6728090U JPH0426530U JP H0426530 U JPH0426530 U JP H0426530U JP 6728090 U JP6728090 U JP 6728090U JP 6728090 U JP6728090 U JP 6728090U JP H0426530 U JPH0426530 U JP H0426530U
- Authority
- JP
- Japan
- Prior art keywords
- processed
- atmosphere
- chamber
- continuous processing
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 claims description 10
- 238000012805 post-processing Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000003795 desorption Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 230000001737 promoting effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728090U JPH0426530U (esLanguage) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6728090U JPH0426530U (esLanguage) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0426530U true JPH0426530U (esLanguage) | 1992-03-03 |
Family
ID=31600718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6728090U Pending JPH0426530U (esLanguage) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0426530U (esLanguage) |
-
1990
- 1990-06-27 JP JP6728090U patent/JPH0426530U/ja active Pending
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